Zeiss Crossbeam 550, Instruction Manual

Page: 36 / 136

3 Product and Functional Description | 3.2 Main Components ZEISS
3.2.3.1 Imaging Modes
Purpose With the FIB option, different imaging modes are available to operate the microscope.
1 2 3
Fig. 11: Imaging modes available with the FIB option
Imaging Mode FIB Mode Characteristics Typical Application
1
SEM imaging
SEM
§
Electron beam is active.
§ Ion beam is blanked.
§
The SE signal is synchronized
to the SEM scan.
High resolution imaging.
2
FIB imaging
FIB § Electron beam is blanked.
§
Ion beam is active.
§
The SE signal is synchronized
to the FIB scan.
§ Channeling contrast imaging.
§
Voltage contrast imaging.
§
Defining milling patterns on the
specimen surface.
§ Grain analysis.
3
Crossbeam
operation
SEM + FIB Image is composed of SEM and
FIB components. Setting the coincidence point.
Mill § No image.
§
Mills with the milling parame-
ters set (milling current).
§ Ion beam milling or ion beam
deposition.
Mill + SEM Mills and generates a SEM image. SEM real-time imaging of the ion
beam milling or deposition.
36 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000