Zeiss Crossbeam 550, Instruction Manual

Page: 76 / 136

6 Operation | 6.2 Obtaining a First Image ZEISS
6.2.7 Optimizing the Image
Purpose Once you have generated an initial image, you can adjust various parameters to optimize the im-
age.
Info
The following procedure describes the best way to quickly optimize the image without the
control panel. You can also use the control panel to adjust aperture alignment, magnification/
focus and brightness/contrast.
Overview The procedure contains the following steps:
§
Adjusting the Magnification [
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§ Moving the Field of View at High Magnifications [
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§
Limiting the Scan Field [
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Aligning the Aperture [
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Selecting the Scan Speed [
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Correcting Astigmatism [
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6.2.7.1 Adjusting the Magnification
1. To switch to the Fine mode, in the Status Bar, click .
à
The button changes to .
2. Step by step, raise the magnification up to Mag 50,000 x and focus in between.
To adjust the magnification and the focus, hold down the left mouse button or the mouse
wheel, respectively, and drag the mouse within the Image Area.
6.2.7.2 Moving the Field of View at High Magnifications
Purpose If you want to move the field of view at high magnifications, use the Beam Shift function instead
of moving the stage.
1. In the Crossbeam SEM Control panel, select the Control tab.
2. In the Alignment section, click Beam Offset.
3. To shift the beam, in the Beam Offset naviga-
tion box, use the scroll bars or the red marker.
76 Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000