ZEISS
6 Operation | 6.2 Obtaining a First Image
6.2.7.3 Limiting the Scan Field
Prerequisite
ü
Adjusting the size and position of the small frame (reduced raster) requires the license RE-
DUCED.
1. In the Toolbar, click the Reduced Raster/Apertures icon.
à
A small scan frame is displayed. This frame defines the specimen area to be scanned by
the electron beam.
à
The image outside the scan frame is frozen.
2. To change the position of the scan frame, click on the green border line and use the mouse
to drag and drop the frame.
3. To change the size of the scan frame, click on the small blue squares on the green border
line and drag them to the desired size.
4. Focus the image in the reduced raster.
6.2.7.4 Aligning the Aperture
1. In the Crossbeam SEM Control panel, select the Control tab.
2. In the Alignment section, click Focus Wobble.
INFO: Focus wobble is a function that sweeps the acceleration voltage. If the aperture is
misaligned, a lateral and vertical shift can be observed.
à
The Focus Wobble window is displayed.
3. To adjust the wobble intensity, use the Wobble Amplitude scroll bar.
4. To accelerate the wobble speed, activate the Wobble Fast checkbox.
5. In the Control tab, click Aperture.
6. In the Aperture Align navigation box, use the scroll bars or the red marker to adjust the
aperture alignment until there is no movement of the detail in X- and Y-direction.
INFO: The specimen detail should just be pulsating without shifting.
7. In the Focus Wobble window, click OFF to deactivate focus wobble.
à
The Focus Wobble window closes.
8. Refocus the image.
6.2.7.5 Selecting the Scan Speed
1. In the Toolbar, from the Faster/Slower drop-down list, select Scan Speed = 7.
Alternatively, in the Crossbeam SEM Control panel, select the Imaging tab, and from the
Scan Speed drop-down list, select Scan Speed = 7.
à
The scan speed is set to Scan Speed = 7.
2. Bring the image into focus.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
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Summary of Contents for Crossbeam 550
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