5.Operation
SEMI F47 Supporting function
5-83
5.10 SEMI F47 supporting function
This function limits motor current when it detects voltage sag warning due to
instantaneous power failure (when voltage dropped to 135
~
152VAC).
This function is provided to support acquiring
“
SEMI F47 Standard
”
that is requisite for
semiconductor equipments.
Combined with Power Failure Detection Delay Time [GroupB ID16], it prevents motor stop
with alarm when in instantaneous power failure and enables to continue operation.
1) Parameter setting
General parameters Group8
“
Control system
”
ID
Symbol
Name
Standard
setting value
Unit
Setting range
3D
TLMREST
The amounts of torque limit value
restoration when power restored.
0.0
%
0.0 to 500.0
2) Operational sequence
This shows the operational sequence from detecting warning of low control power voltage
to restoration of control power voltage.
3) Notes
Set torque limit value under voltage sag warning smaller than that of normal operation.
Even if the torque limit value of voltage sag is greater than that of normal operation, it
limits the torque at the set value when in voltage sag. After power restoration, the limiting
value goes back to that of normal operation.
✔
This function is supposed to limit motor torque when in power failure and does not support all
the load or operating conditions. Check if it properly works on the actual machines before the
actual use.
Control power voltage
Bus voltage
Control power drop
Warning detected
Torque limit value
Instantaneous power interruption
Approx.150V
(
AC200-specificaiton
)
10ms
Torque limit value
selected by TLSEL
Torque limit value selected by
CPETLSEL
The amount of restoration set
by TLMREST
1ms
Torque limit value is returned to normal value in the size of TLMREST [%]/ms after restoration.
Control power voltage
Bus voltage
Control power drop
Warning detected
Torque limit value
Instantaneous power interruption
Approx.150V
(
AC200-specificaiton
)
10ms
Torque limit value selected by
TLSEL
Torque limit value selected by
CPETLSEL
Summary of Contents for M-EGA-15A2301
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