Agilent Technologies 4284A, Operation Manual

Page: 357 / 460

When the DC bias curren t is less than 1 mA, apply N v alue at 1 mA.
When in tegration time is set to SHOR T, m ultiply N v alue b y 5.
When in tegration time is set to LONG, m ultiply N v alue b y 0.5.
T able 9-7.
Coefficient Related to T est Frequency and Measurement
Range
Meas.
Range
T est F requency f
m
[Hz]
20 f
m
<100 100 f
m
<1 k 1 kf
m
<10 k 10 kf
m
1 M
100 0.75 0.225 0.045 0.015
300 2.5 0.75 0.15 0.05
1 k 7.5 2.25 0.45 0.15
3 k 25 7.5 1.5 0.5
10 k 75 22.5 4.5 1.5
30 k 250 75 15 5
100 k 750 225 45 15
Calculation Example
Measurement Conditions
DUT : 100 pF
T est signal lev el : 20 mV
rms
T est frequency : 10 kHz
In tegration time : MEDIUM
Then, DUT's imp edance = 1/(2 210
4
2100 210
-12
) = 159 k
Measuremen t range is 100 k
DC bias curren t << 1 mA
P = 15 (according to T able A)
A
e
of relativ e measuremen t accuracy without bias curren t
isolation is 60.22 [%]. (Refer to \relative measuremen t
accuracy" of sp ecication.)
Then, N = 15 2(159 210
3
)/(100 210
3
) 21/(20 210
-3
) 210
-4
= 0.12 [%]
Therefore, Relative Capacitance measuremen t accuracy is:
6(0.22+0.12) = 60.34 [%]
General Information 9-25