Setting Up the Keysight 5500 SPM
5
Keysight 5500 SPM User’s Guide
5-5
Utilities
The following table summarizes the utility requirements for the
Keysight 5500 SPM.
Noise and Facility Specifications
Acoustic Noise
The semiconductor manufacturing industry has developed a
standardized set of one-third octave band velocity spectra, called
vibration criterion curves (
), to define acceptable
environmental noise. For operation of the Keysight 5500 SPM, facility
acoustic noise should be less than 75 dBc. In order to achieve the
Table 2
Keysight 5500 SPM utility requirements
Configuration
Keysight 5500 SPM
Electrical
1600 W; single phase; 100-120 V or
220-240 VAC; 5 A; 50-60 Hz
Surge protection
Strongly recommended; minimum 7 outlets
Air for isolation chamber
Not required
Internet connection
Recommended