Closed-Loop Scanners
5
Keysight 5500 SPM User’s Guide
5-3
X and Y Sensor Calibration
Initial calibration of the X and Y sensors consists of matching the ±10 V
output range of the sensors with the actual piezo travel, which varies
from scanner to scanner. No sample is required for this procedure.
1
Without a sample in place, load a cantilever and use the laser
alignment controls and camera window to align the laser and
detector mode to set up the microscope for
as described in
.
2
Choose
Controls > Setup > Controller
to confirm the appropriate
controller definition file.
3
Choose
Controls > Setup > Microscope
to confirm the appropriate
microscope definition file.
4
Verify that the correct scanner calibration file is selected in the
Scanner menu.
5
Choose
Scanner > Edit
to open the Scanner Setup dialog box. Select
the
Closed Loop
tab.