Closed-Loop Scanners
5
Keysight 5500 SPM User’s Guide
5-16
CL Z Sensitivity
To calibrate the Z Sensitivity, you will need a step height calibration
standard (the standard calibration grid supplied with your system will
suffice). Its features are 200 nm deep.
1
Set up the microscope for Contact Mode imaging.
2
Initiate an approach.
3
Obtain a 10 micron image centered on one of the calibration standard
pits (
). Flattening should be set to
None
.
Figure 9-9
200 nm deep pit on the calibration standard
4
In the Realtime Images
window, use a Horizontal or Vertical Cross
Section tool to gauge a pit of known depth. If the depth does not
match the actual value, calculate a new Sensitivity value using the
following equation:
5
Enter the new Z Sensitivity value into the Scanner Setup dialog box.
6
Image the same pit again and check that the depth is now measured
at 200 nm. If not, repeat the previous steps until the value is
measured correctly.
NewSensitivity
CurrentSensitivit y Kno
wnSize
MeasuredSize
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=
