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Agilent Technologies B1542A, User Manual

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Contents

Agilent B1542A User’s Guide, Edition 4

1. Introduction

Overview  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3

Typical Technical Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6

Accessories and Options  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7

2. Installation

Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3

RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

DC Probes  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing Instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Connecting GPIB Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6

Installing Pulsed IV Test System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9

Installing DC + Pulsed IV Test System  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Connecting RF Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-17

Connecting DC Probes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-18

Software Installation  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-20

Installing Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

Installing Cable Compensation Data  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-21

After Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-22

Updating Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

If You Remove Pulsed IV Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-23

Rack-mounting Pulse/dc Switch Units  . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-24

Rack-mounting Pulse/dc Switch Units . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-26

Rack-mounting the Infiniium Oscilloscope . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-28

3. Performing System Setup and Compensation

Summary of Contents for B1542A

Page 1: ...Agilent Technologies Agilent B1542A Pulsed IV Package for B1500A EasyEXPERT User s Guide ...

Page 2: ...f this document or of any information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty terms in the sep arate agreement shall control Technology Licenses The hardware and or software described in this document are furnished under a license and may be used or copied o...

Page 3: ...oduct in domestic household waste Product Category With reference to the equipment types in the WEEE Directive Annex I this product is classed as a Monitoring and Control instrumentation product Do not dispose in domestic household waste To return unwanted products contact your local Agilent office or see www agilent com environment product for more information ...

Page 4: ...st definitions used for the pulsed IV measurement Chapter 6 PLSDIV TIS Commands Provides reference information for execution files Plsdiv commands PLSDIV TIS used in the PLSDIV test definitions Chapter 7 Status Code and Error Messages Lists the status code and the error messages NOTE The pulsed IV test system consists of some instruments oscilloscope pulse generator source monitor unit and so on T...

Page 5: ... IV Test System 2 9 Installing DC Pulsed IV Test System 2 11 Connecting RF Probes 2 17 Connecting DC Probes 2 18 Software Installation 2 20 System Requirements 2 20 Installing Software 2 21 Installing Cable Compensation Data 2 21 After Software Installation 2 22 Updating Software 2 23 If You Remove Pulsed IV Software 2 23 Rack mounting Pulse dc Switch Units 2 24 Rack mounting Pulse dc Switch Units...

Page 6: ...rming Measurement Theory of Measurement 4 4 Terminal Voltage and Source Output Value 4 5 Before Measurement 4 6 Performing System Reset 4 7 Pulse Waveform Measurement 4 8 Pulsed Id Vd Measurement 4 10 Pulsed Id Vg Measurement 4 12 DC I V Measurements 4 14 5 PLSDIV Test Definitions PLSDIV Capt Wave 5 4 PLSDIV DC IdVd 5 7 PLSDIV DC IdVd SMU 5 9 PLSDIV DC IdVg 5 12 PLSDIV DC IdVg SMU 5 14 PLSDIV IdVd...

Page 7: ...ring Numeric Input Parameters 6 6 Defining Numeric Output Parameter 6 6 Defining Vector Output Parameter 6 7 Defining String Output Parameter 6 7 Defining Format Field 6 7 Setup Example 6 8 Command Reference 6 9 DispMessage 6 10 PlsdivCaptureMonData 6 11 PlsdivCaptureTimeData 6 12 PlsdivCutoffVd 6 13 PlsdivCutoffVg 6 13 PlsdivErrorMessage 6 13 PlsdivForceVd 6 14 PlsdivForceVg 6 14 PlsdivInit 6 15 ...

Page 8: ...tion 4 Contents PlsdivSetDeviceDelay 6 19 PlsdivSetMeasTime 6 20 PlsdivSetPulseWidth 6 21 PlsdivSetSampling 6 21 PlsdivSetSmoothing 6 22 PlsdivSetTransTime 6 23 PlsdivSetVgLevel 6 23 PlsdivUninit 6 24 7 Status Code and Error Messages ...

Page 9: ...1 Introduction ...

Page 10: ... for B1500 EasyEXPERT is a solution package for the Agilent B1500A or Desktop EasyEXPERT users and provides the automated pulsed IV test environment This chapter introduces Agilent B1542A and consists of the following sections Overview Typical Technical Information Accessories and Options ...

Page 11: ...t Solutions by using the Desktop EasyEXPERT software System Hardware The pulsed IV test system can be configured by using the following equipment See Figure 1 1 The B1542A provides the accessories used to connect the equipment Agilent B1500A Semiconductor Device Analyzer see Table 1 1 Pulse Generator minimum one output channel see Table 1 2 Oscilloscope minimum two measurement channels see Table 1...

Page 12: ...Vd characteristics measurement for B1500A DC Id Vg characteristics measurement for B1500A Pulsed IV system reset Pulsed IV system setup The option B1542A 003 provides the following test definitions DC I V sweep measurement for 4155 4156 E5260 E5270 DC Id Vd characteristics measurement for 4155 4156 E5260 E5270 DC Id Vg characteristics measurement for 4155 4156 E5260 E5270 Figure 1 1 Pulsed IV Test...

Page 13: ...TC 3 06 SMUC 4 07 ADC 1 00 for Desktop EasyEXPERT A 02 00 HOSTC 3 07 SMUC 4 08 ADC 1 00 for Desktop EasyEXPERT A 03 00 or later Agilent Model Number Remarks 81101A 50 MHz output standalone 8110A with 81103A 150 MHz output modular 81110A with 81111A 165 MHz output modular Agilent Model Number Remarks 54852A 2 GHz 4 channels 10 GSa s revision A 05 01 54853A 2 5 GHz 4 channels 20 GSa s revision A 05 ...

Page 14: ... the pulsed IV test system configured by Agilent B1542A Those are not the specifications but the typical and supplemental data the test system can provide Gate pulse width 10 ns to 1 μs Gate pulse voltage 4 5 V to 4 5 V Gate pulse period 100 μs Drain pulse maximum measurement current 80 mA Drain pulse current measurement resolution 1 μA Drain voltage range 10 V to 10 V ...

Page 15: ...ftware license to use media and manual B1542A 003 Pulsed IV option for 4155 4156 E5260 E5270 B1542A 021 Gate cable set B1542A 022 Drain cable set B1542A 023 Docking interface B1542A 024 Pulse dc switch set B1542A 025 Rack mount kit for switch units B1542A 026 Pulsed IV DC probe cable set E3333A E3333A 002 Add 81110A with 1 output channel E3333A 012 Add 54853A 2 5 GHz Infiniium oscilloscope E3333A ...

Page 16: ... E5260 E5270 1 Desktop EasyEXPERT Software CD ROM 1 E1542A 003 Software CD ROM B1542A 021 Gate cable set 1250 2015 1 SMA f BNC m adapter B1542 61601 1 SMA cable 30 cm 54855 67604 1 SMA f BNC m adapter precision type N9120 61681 1 SMA cable 1 5 m B1542 61651 1 DUT cable 1 5 m 1250 1698 1 SMA f m f adapter 909D CFG004 1 Terminator dc 26 5 GHz 3 5 m with option 011 1250 1788 1 SMA m SMA m adapter 116...

Page 17: ...bias network 5188 4153 1 Magnet sheet for fixing the bias T B1542A 023 Docking interface 04142 61636 2 BNC cable 1 5 m E5270 61633 1 Triaxial cable 1 5 m E3334 60031 1 GNDU chassis adapter 16058 61603 1 Triaxial cable 1 5 m 1250 2405 1 BNC m f f adapter 1250 2652 1 BNC f Triax m adapter floating guard 8120 3445 2 GPIB cable 1 m 8710 1582 1 Torque wrench 5 lb 8710 1765 1 Torque wrench 8 lb 5185 217...

Page 18: ...switch unit 16058 61603 2 Triaxial cable 1 5 m 5188 4560 2 D sub 9 pin cable 3 m 5188 4563 1 Wrench T10 8120 3445 1 GPIB cable 1 m B1542A 025 Rack mount kit for pulse dc switch units B1542 00201 1 Panel B1542 01211 1 Rail kit for pulse dc switch units B1542 01212 1 Rail kit for pulse dc switch units B1542 01213 2 Support rail for rack mounting oscilloscope onto Agilent 1181B testmobile system cart...

Page 19: ...TD and 81111A FG 8120 3445 1 GPIB cable 1 m E3333A 012 Add 54853A 2 5 GHz Infiniium oscilloscope 54853A CFG001 1 2 5 GHz Infiniium scope 4 ch 20 GSa s per ch 262k memory ch Windows XP with options A6J and 018 1150 7809 1 Mini keyboard N2500 61905 1 USB mouse 1 Quick Start Guide for 54853A English E3333A 013 Add DSO80204B 2 GHz Infiniium oscilloscope DSO80204B CFG001 1 Infiniium Oscilloscope 2 GHz ...

Page 20: ...1 12 Agilent B1542A User s Guide Edition 4 Introduction Accessories and Options ...

Page 21: ...2 Installation ...

Page 22: ... you complete the rack mounting see Hardware Installation on page 2 6 to install the system equipment CAUTION Using Torque Wrench and Open end Wrench For the RF measurements it is important to carefully contact and fasten the connectors of the RF cables The condition of the cable connections may change the measurement result characteristics Therefore treat the RF cables carefully especially the RF...

Page 23: ... sign of damage that might have occurred during shipment such as dents scratches cuts water marks If you suspect any damage notify your local Agilent Technologies sales or service office 2 When you open the boxes containing the B1542A check the components against the contents lists attached to the boxes See also Table 1 5 If anything is missing notify your local Agilent Technologies sales or servi...

Page 24: ... ground via the shielding of the measurement path RF probes and measurement cables See Figure 2 2 Figure 2 1 RF Probe Connection Prepare two RF probes to perform the pulsed IV measurement The RF probe must have the signal line and the ground lines as shown in Figure 2 2 The signal line is to contact the gate or drain pad and the ground lines are to contact the source well pads For the RF probe and...

Page 25: ...or the contact pads and the DC probes Required cables for connecting the DC probes are provided as the option B1542A 026 DC probe cable set For more information see Connecting DC Probes on page 2 18 When using DC probes minimum pulse width should be limited to approximately 60 nsec to 100 nsec Figure 2 3 Contact Pad and DC Probe Connection Terminator Well Gate Source Drain This makes a current ret...

Page 26: ...h the option B1542A 024 Connecting RF Probes Connecting DC Probes Installing Instruments The pulsed IV test system uses the DC source monitor pulse generator oscilloscope and switch controller with switch units Install the instruments to the appropriate place See Figure 2 4 for example For more information see the manual of each instrument It provides the required environment and the necessary and...

Page 27: ...System Connection Overview Oscilloscope Pulse generator Switch controller 11713A for Option 024 DC source monitor Scope DC source monitor Triaxial cable Divider SMA cable 0 3 m Bias T to input channel for gate to input channel for drain Terminator to SMU Force for drain DC bias Pulse generator RF RF DC DC SMA cable 1 5 m to output channel for gate pulse SMA cable 0 3 m to Gate to Drain BNC cable t...

Page 28: ...A Switch control distributor to SMU Force for gate voltage at DC test to SMU Force for drain voltage at DC test to SMU Force for drain DC bias Drain pulse dc switch unit Gate pulse dc switch unit SMA cable 0 3 m SMA cable 0 3 m SMA cable 1 5 m DUT cable 1 5 m to input channel for drain to input channel for gate Drain Current Monitor Gate Pulse Monitor SMU SMU BNC cable to TRIGGER OUT to AUX Trig I...

Page 29: ... Making Measurement Path for Gate Connect the following accessories as shown in Figure 2 7 And fix the divider to the appropriate place Use a torque wrench and an open end wrench to fasten the SMA connectors Required accessories BNC m SMA f adapter 1 ea for pulse generator BNC m SMA f adapter precision type 1 ea for oscilloscope BNC cable 1 ea SMA cable 0 3 m 1 ea SMA cable 1 5 m 1 ea Divider 1 ea...

Page 30: ...en end wrench to fasten the SMA connectors Required accessories BNC m SMA f adapter precision type 1 ea for oscilloscope SMA cable 0 3 m 1 ea Triaxial cable 1 ea BNC m Triax f adapter floating guard 1 ea Bias T 1 ea Figure 2 8 Measurement Path for Drain Scope DC source monitor Triaxial cable BNC m Triax f adapter floating guard Bias T to input channel for drain to SMU Force for drain DC bias RF RF...

Page 31: ... the retrofit of the option B1542A 024 1 Assembling Gate Switch Unit for B1542A 024 Retrofit on page 2 12 See this section if you retrofit the option B1542A 024 This section is not required when you install the B1542A with the option B1542A 024 2 Assembling Drain Switch Unit for B1542A 024 Retrofit on page 2 13 See this section if you retrofit the option B1542A 024 This section is not required whe...

Page 32: ... Connect the coaxial cables to the divider correctly And fix the divider to the gate switch unit Use a torque wrench and an open end wrench to fasten the SMA connectors 3 Screw and replace the top cover of the gate switch unit Required accessories Gate Pulse dc Switch Unit without divider 1 ea Divider 1 ea Torx wrench furnished with the option B1542A 024 This wrench is needed to remove or fasten t...

Page 33: ... Connect the coaxial cables to the bias T correctly And fix the bias T to the drain switch unit Use a torque wrench and an open end wrench to fasten the SMA connectors 4 Screw and replace the top cover of the drain switch unit Required accessories Drain Pulse dc Switch Unit without bias T 1 ea Bias T 1 ea Torx wrench furnished with the option B1542A 024 This wrench is needed to remove or fasten th...

Page 34: ...cable between the switch distributor Switch 1 connector and the gate pulse dc switch unit 5 Connect the D sub 9 pin cable between the switch distributor Switch 2 connector and the drain pulse dc switch unit Required accessories and equipment Viking cable 1 ea D sub 9 pin cable 2 ea Agilent 11713A Switch Controller 1 ea Switch Control Distributor 1 ea Gate Pulse dc Switch Unit with divider 1 ea Dra...

Page 35: ...erator BNC m SMA f adapter precision type 1 ea for oscilloscope BNC cable 1 ea SMA cable 0 3 m 1 ea SMA cable 1 5 m 1 ea Triaxial cable 1 ea Figure 2 12 Measurement Path for Gate Scope DC source monitor Triaxial cable Pulse generator to SMU Force for gate voltage at DC test Gate pulse dc switch unit SMA cable 0 3 m BNC cable SMA cable 1 5 m to input channel for gate 2 Gate Pulse Monitor SMU to out...

Page 36: ...A connectors Required accessories BNC m SMA f adapter precision type 1 ea for oscilloscope SMA cable 0 3 m 1 ea BNC m Triax f adapter floating guard 1 ea Triaxial cable 2 ea Figure 2 13 Measurement Path for Drain Scope DC source monitor Triaxial cables to SMU Force for drain voltage at DC test to SMU Force for drain DC bias Drain pulse dc switch unit SMA cable 0 3 m Drain Current Monitor SMU to in...

Page 37: ...1 Connect a DUT cable between a RF probe and the bias T s RF DC connector or the Drain pulse dc switch unit s DUT connector of the pulsed IV test system And set the RF probe to the appropriate place 2 Connect the SMA adapters terminator and a DUT cable between a RF probe and the divider or the Gate pulse dc switch unit s DUT connector of the pulsed IV test system And set the RF probe to the approp...

Page 38: ...of the option B1542A 026 SMA f SSMC plug cable 1 ea part of the option B1542A 026 SSMC plug short open cable 3 ea parts of the option B1542A 026 50 mm cable and 70 mm cable are available Use appropriate one For the external view and the internal connection see Figure 2 16 Figure 2 15 DC Probe Connections Terminator Well Gate Source Drain 1 2 3 4 5 Gate DC probe Source DC probe Signal Signal Gnd Gn...

Page 39: ...This electrically connects the Source probe needle Source probe shield and Drain probe shield together 5 Connect a SSMC cable between the Well DC probe and the Source DC probe and set the DC probe to the appropriate place Then the black sleeve plug must be the Source side This electrically connects the Well probe needle Well probe shield and Source probe shield together 6 Connect a DUT cable betwe...

Page 40: ...ware System Requirements The pulsed IV system software is allowed to be installed in the one of the following system controller Agilent B1500A s internal system controller EasyEXPERT software revision A 02 00 or later Computer where Desktop EasyEXPERT software is installed Desktop EasyEXPERT software revision A 02 00 or later B1500A VXIplug play driver revision A 02 00 to use B1500A E5260A VXIplug...

Page 41: ...t EasyEXPERT software or Desktop EasyEXPERT software If the Start EasyEXPERT window is opened close it 2 Insert the B1542A 003 software CD ROM into the CD ROM drive 3 Execute the following file in the CD ROM Agilent B1542A_Opt003 B1542A_Opt003_installer msi 4 Follow the instructions of the setup wizard And wait until the program installation is completed 5 After the installation remove the CD ROM ...

Page 42: ...pulsed IV test definitions listed below from the following folder C Program Files Agilent PLSDIV TestDefinitions PLSDIV IdVd PLSDIV IdVg PLSDIV DC IdVd PLSDIV DC IdVg PLSDIV Capt Wave PLSDIV Setup PLSDIV Reset 5 Optional for the system with the option B1542A 003 Import the test definitions listed below PLSDIV IV SMU PLSDIV DC IdVd SMU PLSDIV DC IdVg SMU 6 Open the PLSDIV Setup test definition and ...

Page 43: ...ion in the Library list and click Delete Definition of This Test to open the confirmation dialog box And click OK to delete the test definition from the present workspace Repeat this to delete all of the pulsed IV test definitions 7 Import the pulsed IV test definitions from the following folder C Program Files Agilent PLSDIV TestDefinitions NOTE You do not need to perform Installing Cable Compens...

Page 44: ...k mounting the Agilent Infiniium oscilloscope onto the Agilent 1181B system cart To rack mount the Infiniium oscilloscope onto the Agilent 1181B use these parts and the Agilent E2609B rack mount kit The E2609B is the rack mount kit to rack mount the Infiniium oscilloscope onto an Agilent instrument rack This section covers the following topics Rack mounting Pulse dc Switch Units Rack mounting the ...

Page 45: ...m oscilloscope onto the Agilent instrument rack 1 Rack mount kit for Infiniium oscilloscope 5 EIA 3 B1542A 025b b B1542A 025 contains the support rails for rack mounting the Infiniium oscilloscope onto the Agilent 1181B testmobile system cart 1 Rack mount kit for pulse dc switch units 4 E7731A 2 Blank panel 1 EIA 5 5063 9212 1 Rack mount flange kit for pulse generator 2 EIA 6 5063 9240 1 Rack moun...

Page 46: ...il kit 3 Assemble the pulse dc switch unit panel by mounting the following units on the panel A Use screws listed above to fix the units 4 Align the pulse dc switch unit panel A with D E and F with the rail assemblies secured to the system rack in the step 2 gently slide the panel on the rails until it stops and secure the panel to the system rack by using the typical rack mounting method of the r...

Page 47: ... Installation Rack mounting Pulse dc Switch Units Figure 2 19 Assembling Rail Kit Figure 2 20 Rack mounting Pulse dc Switch Units 6FUHZ 6FUHZ KROH IRU V VWHP FDUW 6FUHZ KROH IRU LQVWUXPHQW UDFN 6FUHZ KROH IRU LQVWUXPHQW UDFN C A B E D F 4 2 2 3 ...

Page 48: ...lloscope panel See Installation Guide of Agilent E2609B rack mount kit for details 3 Align the oscilloscope panel oscilloscope with A with the support rails secured to the system rack in the step 1 gently slide the panel on the rails until it stops and secure the panel to the system rack by using the typical rack mounting method of the rack mount flange kit Figure 2 21 Rack mounting Infiniium Osci...

Page 49: ...3 Performing System Setup and Compensation ...

Page 50: ...270B E5260 series see Starting System Setup for B1542A 003 instead of Starting System Setup NOTE Drain Cable Replacement It is inadequate to replace only the defective part when you find any defect in the drain measurement path The compensation data of the measurement path must be also updated after the replacement Order the drain cable set and replace it After that perform the compensation data i...

Page 51: ...tion factors of the pulsed IV test system See Compensation on page 3 11 Drain Cable Replacement This action is necessary to obtain and update the compensation factors of the bias T and the cable of the drain measurement path See Drain Cable Replacement on page 3 16 Table 3 1 Execution Timing and Required Action When the system setup is required Required action after system installation System Conf...

Page 52: ...2 ea required if B1542A 024 is not equipped BNC cable 1 ea BNC m Triax f adapter floating guard 1 ea BNC m f f adapter 1 ea GNDU chassis adapter 1 ea 2 If the Start EasyEXPERT window is opened on the system controller close it first The system controller is the B1500A for the EasyEXPERT users or an external computer for the Desktop EasyEXPERT users 3 Launch Agilent Connection Expert see Figure 3 1...

Page 53: ...troller to No e Set the GPIB address to the appropriate value non 21 value It must be set to the Desktop EasyEXPERT Execution Mode dialog box f Close Agilent Connection Expert and reboot the B1500A After that leave the Start EasyEXPERT window on the B1500A screen g Connect the GPIB cable between the B1500A and the system controller if it is still not connected 8 Launch EasyEXPERT or Desktop EasyEX...

Page 54: ... system or the option B1542A 024 No for the pulsed IV test system 15 Save the test setup to your preset group My Favorite Setup 16 Connect GPIB cable between the system controller and the system instruments if it is still not connected 17 Connect BNC cable between the pulse generator TRIGGER OUT connector and the oscilloscope AUX Trig In connector if it is still not connected 18 Turn on the system...

Page 55: ...to the system accessories and the system components Triaxial cable 2 ea required if B1542A 024 is not equipped BNC cable 1 ea BNC m Triax f adapter floating guard 1 ea BNC m f f adapter 1 ea GNDU chassis adapter 1 ea 2 If the Start EasyEXPERT window is opened on the system controller close it first 3 Launch Agilent Connection Expert see Figure 3 3 Figure 3 3 Agilent Connection Expert GPIB0 VISA in...

Page 56: ...60 series set B1500A Even though the execution mode is the Offline the PLSDIV system software can control the DC source monitor 8 Click the Start EasyEXPERT button 9 Open your workspace or create a new workspace 10 Display the Application Test tab screen 11 Open the PLSDIV Setup test definition See Figure 3 4 12 Set the DcSwitch field as follows Yes for the DC pulsed IV test system or the option B...

Page 57: ...Agilent B1542A User s Guide Edition 4 3 9 Performing System Setup and Compensation Starting System Setup for B1542A 003 Figure 3 4 PLSDIV Setup Test Definition ...

Page 58: ...iguration Parameters Field name Description Controller Select B1500A Internal or External PC Visa Name Enter the VISA interface ID of the GPIB interface Instrumentations PGU Specify the pulse generator to be used DSO Specify the oscilloscope to be used SMU Specify the DC source monitor to be used USB Address If Controller B1500 Internal enter the B1500A s internal USB address GPIB Address a a To k...

Page 59: ...pensation Factor Measurement Setup 1 Open the PLSDIV Setup test setup from your preset group 2 Set the Action field to Compensation 3 Click the Single button at the upper right corner of the EasyEXPERT Desktop EasyEXPERT screen Connection diagram window is displayed See Figure 3 5 62 608 7ULD LDO FDEOHV 1 I 1 P 7ULD I DGDSWHU IORDWLQJ JXDUG 7ULD I 1 FDEOH 1 P I I DGDSWHU 1 8 FKDVVLV DGDSWHU WR 75 ...

Page 60: ...essage box to confirm the execution of measurement Click Cancel to cancel the setup e Click OK on the message box to continue the setup This starts the compensation data measurement and opens a dialog box to show the measurement status And after the measurement another connection diagram window is displayed Click Cancel to cancel the setup f Disconnect the triaxial cables from the oscilloscope inp...

Page 61: ...rement Click Cancel to cancel the setup e Click OK on the message box to continue the setup This starts the compensation data measurement and opens a dialog box to show the measurement status And after the measurement another connection diagram window is displayed Click Cancel to cancel the setup f Disconnect the triaxial cables from the oscilloscope input channel and connect them to the oscillosc...

Page 62: ...me measurement Click Cancel to cancel the setup c Click OK on the message box to perform the delay time measurement This starts the measurement and opens a dialog box to show the measurement status After the measurement the Compensation action is completed Click Cancel to cancel the setup Figure 3 6 Gate to Drain Delay Time Measurement Setup for Pulse IV Test System 62 608 7ULD LDO FDEOH LYLGHU 1 ...

Page 63: ... 11713A Switch control distributor to SMU Force for gate voltage at DC test to SMU Force for drain voltage at DC test to SMU Force for drain DC bias Drain pulse dc switch unit Gate pulse dc switch unit SMA cable 0 3 m SMA cable 0 3 m SMA cable 1 5 m DUT cable 1 5 m to input channel for drain to input channel for gate Drain Current Monitor Gate Pulse Monitor SMU SMU BNC cable to TRIGGER OUT to AUX ...

Page 64: ...les used for the drain terminal measurement path 1 Open the PLSDIV Setup test setup from your preset group 2 Set the Action field to Drain Cable Replacement 3 Click the Single button at the upper right corner of the EasyEXPERT Desktop EasyEXPERT screen The connection diagram window is displayed See Figure 3 6 for the pulsed IV test system or Figure 3 7 for the DC pulsed IV test system ...

Page 65: ...4 Performing Measurement ...

Page 66: ...n the instruments and turn on the system controller if it is used Launch EasyEXPERT or Desktop EasyEXPERT NOTE If You Use External Controller to Control B1500A Set the B1500A GPIB configuration by using the Agilent Connection Expert installed in the B1500A as follows And reboot the B1500A System Controller No GPIB address appropriate value non 21 value Leave the Start EasyEXPERT window on the B150...

Page 67: ...ffline execution modes are available for the Desktop EasyEXPERT A 03 00 users Only the Offline execution mode is available for the Desktop EasyEXPERT A 02 00 users To use the Online mode specify the system controller s VISA interface ID and the DC source monitor s GPIB address In the Online mode the following test definitions are available for the DC I V measurement PLSDIV DC IdVd PLSDIV DC IdVg T...

Page 68: ... matching of the instrument s input output terminals and to avoid the reflection at the gate terminal Figure 4 1 Pulsed IV Measurement Circuit Diagram Simplified measurement circuit is shown in Figure 4 2 Vpgu out is the PGU output voltage pulse peak value And VdSet is the SMU output voltage By applying VdSet and Vpgu out to the MOSFET the oscilloscope s drain voltage monitor channel will capture ...

Page 69: ... path shunt resistor residual resistor and so on Therefore it is required to select which value should be the target voltage before performing the measurement To select it use the drain voltage automatic adjustment function and the gate voltage automatic adjustment function in the pulsed IV test definitions If the drain voltage automatic adjustment function is ON VdInt will be close to the target ...

Page 70: ...e 2 4 and measure the delay time between the gate monitor pulse and the drain monitor pulse by using the oscilloscope Then decide the device delay time shown in Figure 4 3 3 DcSwitch value on Extended Setup dialog box of pulsed IV test setup Yes for the DC pulsed IV test system or the option B1542A 024 No for the pulsed IV test system 4 SWAddress value on Extended Setup dialog box of pulsed IV tes...

Page 71: ...sets the pulsed IV test system Execute this definition when the test system is in any abnormal condition 1 Open the PLSDIV Reset test definition on the EasyEXPERT application test environment 2 Click the Single button at the upper right corner of the EasyEXPERT screen The system reset is performed Figure 4 4 PLSDIV Reset Test Definition ...

Page 72: ...nvironment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV Capt Wave on page 5 4 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulse waveform measurement is started Figure 4 6 is the measurem...

Page 73: ...Agilent B1542A User s Guide Edition 4 4 9 Performing Measurement Pulse Waveform Measurement Figure 4 6 Voltage Pulse Measurement Example Figure 4 7 Current Pulse Measurement Example ...

Page 74: ...asyEXPERT application test environment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV IdVd on page 5 17 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulsed Id Vd measurement is started Figu...

Page 75: ...Agilent B1542A User s Guide Edition 4 4 11 Performing Measurement Pulsed Id Vd Measurement Figure 4 9 Pulsed Id Vd Measurement Example ...

Page 76: ...asyEXPERT application test environment 2 Set the measurement condition to the Device Parameters Test Parameters and Extended Test Parameters For the description of the entry fields see PLSDIV IdVg on page 5 21 3 Connect the device under test MOSFET as shown in RF Probes on page 2 4 4 Click the Single button at the upper right corner of the EasyEXPERT screen Pulsed Id Vg measurement is started Figu...

Page 77: ...Agilent B1542A User s Guide Edition 4 4 13 Performing Measurement Pulsed Id Vg Measurement Figure 4 11 Pulsed Id Vg Measurement Example ...

Page 78: ...nition of EasyEXPERT or Desktop EasyEXPERT The following two test definitions are available for the B1500A And they can be used for the DC I V measurements using the 4155B C or 4156B C with the Desktop EasyEXPERT Online mode The Online mode for the 4155B C or 4156B C is supported by the Desktop EasyEXPERT A 03 00 or later PLSDIV DC IdVd PLSDIV DC IdVg The following three test definitions are avail...

Page 79: ...5 PLSDIV Test Definitions ...

Page 80: ...ple 3 Describes the setup parameters 4 Describes the test output parameters 5 Explains any additional information NOTE The PLSDIV test definitions are stored in the following folder C Program Files Agilent PLSDIV TestDefinitions To use the PLSDIV test definitions import the definitions to your workspace The test definitions can be imported as shown below 1 Display the Application Test tab screen 2...

Page 81: ...o force the gate voltage pulse controls the oscilloscope to monitor the gate voltage and the drain voltage calculates the drain current and displays the Id Vg characteristics PLSDIV DC IdVd For the DC Id Vd measurement using the B1500A or Desktop EasyEXPERT Online mode Controls SMUs to force the drain voltage and the gate voltage measures the drain current and displays the Id Vd characteristics PL...

Page 82: ... pulse waveform Figure 5 1 Pulse Waveform Measurement Result Example Device Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch force the specified value or Pch force the negative specified value See Parameters on page 5 31 Lg Gate length in m 1 nm 4 digits or 1 nm resolution Wg Gate width in m 1 nm 4 digits or 1 nm resolution Temp Tem...

Page 83: ...n For more details see Parameters on page 5 31 TransTime Pulse leading trailing edge transition time in s 2 ns to 500 ns 3 digits or 1 ns resolution MeasTime Measurement timing at the pulse top 0 to 1 3 digits or 0 01 resolution SmplNum Oscilloscope sampling number 16 to 262144 6 digits or 1 step SmthNum Oscilloscope smoothing number 3 to 4001 4 digits or 1 step SmthStat Status of the oscilloscope...

Page 84: ...output parameters are displayed after the test Time Oscilloscope time data in s GateMon Oscilloscope gate voltage waveform data in V DrainMon Oscilloscope drain current waveform in A if DrainMonMode Current Drain voltage waveform data in V if DrainMonMode Voltage The drain voltage waveform data will be the data after compensation The drain current waveform data will be the data given by converting...

Page 85: ...ng parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 Ω 4 digits or 1 mΩ resolution TermR Resistance of terminator 1 mΩ 4 digits or 1 mΩ resolution TermR No applies 1E 30 Ω Gate SMU connected to the gate terminal VgStart Secondary sweep start voltage for the gate terminal 10 to 10 V 4 digits or 10 mV resolution VgStop ...

Page 86: ...R Extended Test Parameters The following parameters are available to set the test condition IgLimit Gate current compliance in A 1 nA to 100 mA 3 digits or 1 nA resolution Set the value that covers current to the terminator For example the current is 100 mA for TermR 50 Ω with Vg 5 V IntegTime Integration time SHORT MEDIUM or LONG HoldTime Hold time in s 0 to 655 35 5 digits or 10 ms resolution De...

Page 87: ...Test Parameters The following parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 Ω 4 digits or 1 mΩ resolution TermR Resistance of terminator 1 mΩ 4 digits or 1 mΩ resolution TermR No applies 1E 30 Ω Gate Channel number of the SMU connected to the gate terminal Slot1 to Slot8 Maximum channel number depends on the confi...

Page 88: ...ignore the numbers after the decimal point Number of sweep points VgStop VgStart VgStep 1 Gate voltage To apply the specified voltage Vg to the gate terminal the SMU output voltage VgSet will be set to the following value VgSet Vg TermR CableR TermR Extended Test Parameters The following parameters are available to set the test condition IgLimit Gate current compliance in A 1 nA to 100 mA 3 digits...

Page 89: ...35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 μs resolution InstType Type of DC source monitor E526x E527x or FLEX415x E526x for Agilent E5260A E527x for Agilent E5270B FLEX415x for Agilent 4155 4156 InstAddress GPIB address of the DC source monitor Integer 1 to 32 DcSwitch Availability of the pulse dc switch units Yes exists DC IV measurement connection wil...

Page 90: ...ing parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 Ω 4 digits or 1 mΩ resolution TermR Resistance of terminator 1 mΩ 4 digits or 1 mΩ resolution TermR No applies 1E 30 Ω Gate SMU connected to the gate terminal VgStart Primary sweep start voltage for the gate terminal 10 to 10 V 4 digits or 10 mV resolution VgStop P...

Page 91: ...mR CableR TermR Extended Test Parameters The following parameters are available to set the test condition IgLimit Gate current compliance in A 1 nA to 100 mA 3 digits or 1 nA resolution Set the value that covers current to the terminator For example the current is 100 mA for TermR 50 Ω with Vg 5 V IntegTime Integration time SHORT MEDIUM or LONG HoldTime Hold time in s 0 to 655 35 5 digits or 10 ms...

Page 92: ...on Test Parameters The following parameters are available to set the source output CableR Residual resistance of the gate measurement path from SMU to terminator 0 Ω 4 digits or 1 mΩ resolution TermR Resistance of terminator 1 mΩ 4 digits or 1 mΩ resolution TermR No applies 1E 30 Ω Gate Channel number of the SMU connected to the gate terminal Slot1 to Slot8 Maximum channel number depends on the co...

Page 93: ...n ignore the numbers after the decimal point Number of sweep points VdStop VdStart VdStep 1 Gate voltage To apply the specified voltage Vg to the gate terminal the SMU output voltage VgSet will be set to the following value VgSet Vg TermR CableR TermR Extended Test Parameters The following parameters are available to set the test condition IgLimit Gate current compliance in A 1 nA to 100 mA 3 digi...

Page 94: ...n s 0 to 655 35 5 digits or 10 ms resolution DelayTime Delay time in s 0 to 655 35 5 digits or 100 μs resolution InstType Type of DC source monitor E526x E527x or FLEX415x E526x for Agilent E5260A E527x for Agilent E5270B FLEX415x for Agilent 4155 4156 InstAddress GPIB address of the DC source monitor Integer 1 to 32 DcSwitch Availability of the pulse dc switch units Yes exists DC IV measurement c...

Page 95: ...ce Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch force the specified value or Pch force the negative specified value See Parameters on page 5 31 Lg Gate length in m 1 nm 4 digits or 1 nm resolution Wg Gate width in m 1 nm 4 digits or 1 nm resolution Temp Temperature in degree 4 digits or 0 001 degree resolution IdMax Maximum drai...

Page 96: ...minal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStop Primary sweep stop voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStep Primary sweep step voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStart VdStop VdStep The parameters set the primary sweep source used to apply the drain voltage The number of sweep points...

Page 97: ...4 digits or 1 step SmthStat Status of the oscilloscope smoothing Enable or Disable AvgNum Oscilloscope averaging number 1 to 4095 4 digits or 1 step VdAdjust Status of the drain voltage automatic adjustment Enable or Disable VgAdjust Status of the gate voltage automatic adjustment Enable or Disable RangingMode Measurement ranging mode Auto or Fixed ConnectChk Status of the connection check at init...

Page 98: ...tic adjustment IdPerWg Drain current per unit gate width in A μm IdPerWg Id Wg VgMon VdInt and Id values will be the value obtained at the data extraction timing on the pulse top See Figure 5 9 VdConv and VgConv returns 0 convergence condition is satisfied or 1 not satisfied If the automatic adjustment is OFF 0 is returned If the drain voltage automatic adjustment function is ON VdInt will be clos...

Page 99: ...ce Parameters The following parameters are available to set the test condition Polarity Polarity of source output Nch force the specified value or Pch force the negative specified value See Parameters on page 5 31 Lg Gate length in m 1 nm 4 digits or 1 nm resolution Wg Gate width in m 1 nm 4 digits or 1 nm resolution Temp Temperature in degree 4 digits or 0 001 degree resolution IdMax Maximum drai...

Page 100: ...l SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStop Secondary sweep stop voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VdStep Secondary sweep step voltage for the drain terminal SMU output 10 V to 10 V 5 digits or 1 mV resolution VgStart VgStop VgStep The parameters set the primary sweep source used to apply the gate voltage The number of sweep points ...

Page 101: ...4 digits or 1 step SmthStat Status of the oscilloscope smoothing Enable or Disable AvgNum Oscilloscope averaging number 1 to 4095 4 digits or 1 step VdAdjust Status of the drain voltage automatic adjustment Enable or Disable VgAdjust Status of the gate voltage automatic adjustment Enable or Disable RangingMode Measurement ranging mode Auto or Fixed ConnectChk Status of the connection check at init...

Page 102: ...tic adjustment IdPerWg Drain current per unit gate width in A μm IdPerWg Id Wg VgMon VdInt and Id values will be the value obtained at the data extraction timing on the pulse top See Figure 5 9 VdConv and VgConv returns 0 convergence condition is satisfied or 1 not satisfied If the automatic adjustment is OFF 0 is returned If the drain voltage automatic adjustment function is ON VdInt will be clos...

Page 103: ... on the configuration of DC source monitor StartV1 Primary sweep start voltage 100 to 100 V 6 digits or 1 μV resolution StopV1 Primary sweep stop voltage 100 to 100 V 6 digits or 1 μV resolution StepV1 Primary sweep step voltage 100 to 100 V 6 digits or 1 μV resolution Comp1 Primary sweep current compliance in A 100 mA to 100 mA 6 digits or 1 fA resolution StartV1 StopV1 StepV1 The parameters set ...

Page 104: ...ement Slot1 to Slot8 Maximum channel number depends on the configuration of DC source monitor RangeMode Current measurement ranging mode Auto LimitedAuto or Fixed MeasRange Current measurement range 10 pA to 100 mA 6 digits or 10 pA resolution Available measurement range depends on the type of SMU ADCType Only for the E5260 E5270 series Type of A D converter HighSpeed or HighResolution IntegMode O...

Page 105: ...E526x for Agilent E5260A E527x for Agilent E5270B FLEX415x for Agilent 4155 4156 AddrGPIB GPIB address of the DC source monitor Integer 1 to 32 Test Output The following output parameters are displayed after the test SweepV1 Primary sweep source output data in V This is the X axis data of the X Y graph SweepV2 Secondary sweep source output data in V IMeas1 Current measurement data in A This is the...

Page 106: ...ng samples given by the following formula 1 to 100 Number of averaging samples IntegNum 128 The E5260 E5270 gets 128 samples in a power line cycle repeats this for the times you specify and performs averaging to get the measurement data HighResolution Auto Value that defines the integration time given by the following formula 1 to 127 Integration time IntegNum system defined value where system def...

Page 107: ...e Edition 4 5 29 PLSDIV Test Definitions PLSDIV Reset PLSDIV Reset This test definition resets and initializes the pulsed IV test system Device Parameters None Test Parameters None Extended Test Parameters None Test Output None ...

Page 108: ... Specifies the GPIB address and the source or measurement channels of PGU pulse generator DSO digital sampling oscilloscope and SMU source monitor unit used for the pulsed IV measurement Perform this action after completing the system installation or after changing a channel assignment or after changing the GPIB address of system components Compensation Obtains and updates the compensation factors...

Page 109: ...es Figure 5 6 shows the polarity of gate pulse voltage DeviceDelay DeviceDelay defines the delay time set to the oscilloscope and used to compensate a skew caused by the device under test This is important to synchronize the gate pulse and the gate pulse Check the pulse waveform and read the delay time between the gate pulse and the drain pulse Figure 5 6 Polarity Figure 5 7 DeviceDelay 3XOVH DVH ...

Page 110: ...e voltage automatic adjustment function to obtain the stable gate pulse voltage See VgAdjust on page 5 35 Pulse amplitude must be 55 mV and 4 5 V To use the gate voltage automatic adjustment function set the pulse amplitude to 4 0 V TransTime TransTime is the gate pulse transition time for both leading and trailing edges and defined as shown in Figure 5 8 Initially this value is set to 2 ns Changi...

Page 111: ... If you change this value check the pulse waveform and choose the point where the pulse voltage is flat and stable Figure 5 9 MeasTime SmplNum SmplNum defines the sampling number set to the oscilloscope Set the value in order to display the pulse waveform on the oscilloscope screen A small number will improve measurement throughput Sampling rate of the oscilloscope is set to the value automaticall...

Page 112: ...to reduce variations caused by high frequency components Set the value in order to display the pulse waveform on the oscilloscope screen A too large number of smoothing points loses waveform edges which disturbs accurate results Figure 5 10 Smoothing Function AvgNum AvgNum specifies the measurement averaging number set to the oscilloscope The scope measures pulse waveform the specified number of t...

Page 113: ...his function OFF This brings higher measurement throughput VgAdjust VgAdjust sets the gate voltage automatic adjustment function ON or OFF This function is used to obtain stable gate voltage When this function is OFF the PGU forces Vg specified gate voltage When this function is ON the PGU output level will be automatically controlled so that Vg is applied to the gate terminal If you do not mind t...

Page 114: ...tions divider is not connected terminator is not connected T adapter is connected instead of divider bias T s DC RF connector is connected to the gate monitor channel GateZero GateZero sets the gate monitor channel zero measurement ON or OFF This function is used to measure the offset data of the gate voltage monitor path and update the offset value stored in a system file Before performing the of...

Page 115: ...6 PLSDIV TIS Commands ...

Page 116: ...the PLSDIV application test definitions This chapter consists of the following sections Command Summary Entering Plsdiv Commands Command Reference NOTE The Plsdiv commands are stored in the following folder C Program Files Agilent PLSDIV PLSDIVExe TISExe To execute the Plsdiv commands all of the required files must be installed properly See Chapter 6 PLSDIV TIS Commands ...

Page 117: ...before the PlsdivCaptureMonData command can be executed NOTE PlsdivUninit makes all Plsdiv commands inexecutable Execute PlsdivInit to use the Plsdiv commands PlsdivCutoffVd makes PlsdivMeasureId inexecutable Execute PlsdivForceVd before PlsdivMeasureId PlsdivCutoffVg makes PlsdivMeasureId inexecutable Execute PlsdivForceVg before PlsdivMeasureId Figure 6 1 Plsdiv Command Execution Sequence 3OVGLY...

Page 118: ...itch off PlsdivCutoffVg Sets the PGU pulse generator unit output switch off PlsdivErrorMessage Returns the error number and error message for the specified status code PlsdivSetSampling Sets the oscilloscope sampling rate and sampling number for the pulsed IV measurement PlsdivSetSmoothing Enables or disables smoothing of the specified oscilloscope channel PlsdivSetPulseWidth Sets the pulse width ...

Page 119: ...Field Command Parameters The Windows Command Execution component supports one input variable and one output variable To use multiple string input parameters or multiple numeric input parameters set the variable as shown below Multiple vector input parameters and multiple output parameters are not supported If the command requires multiple string input parameters use string variables In the Windows...

Page 120: ...on tab screen or the Local Variable Definition component in the Test Contents tab screen 2 Set the Write Type to String in the Windows Command Execution component 3 Add a line in the Write String area 4 Enter the variable name for the first parameter in the first line If the command needs multiple input parameters add a line and enter the variable name for the variable in the added line Then obser...

Page 121: ...the variable name in the String field of the Read String area The Result field and the Length Actually Read field can be blank or the name of a numeric variable defined in the Test Specification or Local Variable Definition The variable will be used to receive the command execution result or the length of the returned string data Defining Format Field The Format field requires a keyword to specify...

Page 122: ...be defined in the Test Specification tab screen or the Local Variable Definition component on the Test Contents tab screen Input parameter values must be set to the variables before executing the command Four data will be assigned to read_data in sequence Table 6 3 Windows Command Execution Setup Example F Meaning F Meaning C or c Circulation N or n Numeric D or d Decimal numeric P or p Percent E ...

Page 123: ... command if any exists 7 Lists the output parameters Read String Read Value or Read List returned by the command if any exists 8 Describes the response execution result returned by the command and can be read by using the Result field of the Read String Value List area if it exists 9 Explains any additional information NOTE The Plsdiv commands are stored in the following folder C Program Files Agi...

Page 124: ...and opens a pop up window and displays the specified string This command can be executed without the PlsdivInit command Filename DispMessage exe Write Type String Read Type None Write String This command needs the following input parameter message Specify a message to display in the pop up window ...

Page 125: ...e 0 gate or 1 drain sampling_num Sampling number of oscilloscope Numeric value 16 to 262144 The value must be the same as the sampling_num parameter value set to the PlsdivSetSampling command drain_mode Drain data type Numeric value 0 voltage or 1 current If term 0 this command returns the gate voltage data If term 1 and drain_mode 0 this command returns the drain voltage data If term 1 and drain_...

Page 126: ...e String This command needs the following input parameter sampling_num Sampling number of oscilloscope Numeric value 16 to 262144 The value must be the same as the sampling_num parameter value set to the PlsdivSetSampling command Read List This command returns the following output parameter read_data Oscilloscope horizontal data time data Vector data The number of returned data is sampling_num if ...

Page 127: ...sdivErrorMessage If no error is detected by this command execution 0 is returned PlsdivErrorMessage This command returns the error number and error message for the specified status code For the error code and message see Status Code and Error Messages on page 7 1 Filename PlsdivErrMessage exe Write Type String Read Type String Write String This command needs the following input parameter status_co...

Page 128: ...ns the gate voltage monitor value Execution Conditions PlsdivSetPulseWidth and PlsdivSetVgLevel commands must be executed before this command in this sequence Filename PlsdivForceVg exe Write Type String However this command does not need any input parameter Read Type List Read List This command returns the following output parameters in this sequence To read the values specify a vector variable i...

Page 129: ...ect_check Connection check status Numeric value 0 does not perform or 1 performs connection check in the PlsdivInit process gate_zero Gate zero status Numeric value 0 does not perform or 1 performs gate monitor channel offset measurement in the PlsdivInit process Gate Zero This function is used to measure the offset data of the gate voltage monitor path and update the offset value in a system file...

Page 130: ...on Figure 6 3 Bias T connection Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned 3XOVH HQHUDWRU DWH SXOVH VRXUFH FKDQQHO DWH SXOVH PRQLWRU FKDQQHO LYLGHU 7HUPLQDWRU LJLWDO 6WRUDJH 2VFLOORVFRSH LDV 7 5 5 JLOHQW WR 608 RUFH WHUPLQDO RQ WKH UHDU SDQHO LJLWDO 6WRUDJH 2VFLOORVFRSH UDLQ FXUUHQW PRQLWRU FKD...

Page 131: ... This mode will improve measurement throughput Read List This command returns the following output parameters in this sequence To read the values specify a vector variable in the Values field of the ReadList area The values are stored in the first element to the fourth element of the vector variable id Drain current calculated from vd_actual Numeric value in A vd_set Drain voltage SMU output value...

Page 132: ...te Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameters in this sequence term Terminal Numeric value 0 gate or 1 drain adj_stat Function status Numeric value 0 off or 1 on Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command executi...

Page 133: ...ct the device under test apply voltage pulse to the gate terminal and monitor the gate pulse and the drain pulse as shown in Figure 6 4 Filename PlsdivSetDeviceDelay exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameter device_delay Delay time caused by test device in second Numeric value 0 000...

Page 134: ...value may cause measurement errors Filename PlsdivSetMeasTime exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameter meas_time Data extraction timing Numeric value 1 to 1 Default value is 0 5 The data extraction timing is specified by the rate for the pulse width as shown in Figure 6 5 Figure 6 ...

Page 135: ...the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned Figure 6 6 Pulse Setup Parameters PlsdivSetSampling This command sets the oscilloscope sampling rate and sampling number for the pulsed IV measurement Remarks Adjust the sampling number and the sampling rate carefully to obtain the waveform you desire To obtain faster measurement throughput dec...

Page 136: ...etSmoothing exe Write Type String Read Type String However this command does not return any output parameter Write String This command needs the following input parameters in this sequence ch Oscilloscope channel Numeric value 0 channel for gate or 1 channel for drain smooth_stat Smoothing function on or off Numeric value 0 off or 1 on smooth_num Number of measurement points used for smoothing Num...

Page 137: ...command needs the following input parameter trans_time Transition time in second Numeric value 2 nsec to 200 msec This value must be less than half of the pulse_width parameter value set to the PlsdivSetPulseWidth command Response Status code Numeric value To read the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned PlsdivSetVgLevel This command ...

Page 138: ...meric value To read the error message use PlsdivErrorMessage If no error is detected by this command execution 0 is returned PlsdivUninit This command resets the pulsed IV test system all instruments and closes GPIB communication to each instrument After executing this command any Plsdiv commands except for PlsdivInit cannot be executed So make sure to execute PlsdivInit before executing any comma...

Page 139: ...7 Status Code and Error Messages ...

Page 140: ...d instrument manuals and solve problems However if the problems still remain perform a self test If the instrument fails in the self test or the problems still remain contact your nearest Agilent Technologies Service Center For the latest edition of electronic manuals and support information visit the Agilent Technologies support site http www home agilent com and select United States Home Product...

Page 141: ...strument manual SYSPIV_ERROR_PARAMETER1 BFFC1010 4112 Invalid value for parameter 1 SYSPIV_ERROR_PARAMETER2 BFFC1011 4113 Invalid value for parameter 2 SYSPIV_ERROR_PARAMETER3 BFFC1012 4114 Invalid value for parameter 3 SYSPIV_ERROR_PARAMETER4 BFFC1013 4115 Invalid value for parameter 4 SYSPIV_ERROR_PARAMETER5 BFFC1014 4116 Invalid value for parameter 5 SYSPIV_ERROR_PARAMETER6 BFFC1015 4117 Invali...

Page 142: ...efore this command SYSPIV_ERROR_CPM_SAMPLING_NUM_INCO MPATIBLE BFFC1023 4131 PlsdivCaptureMonData Define the same value as the sampling number specified by PlsdivSetSampling SYSPIV_ERROR_CPM_DRAIN_MODE_INVALI D BFFC1024 4132 PlsdivCaptureMonData The drain data type must be 0 voltage or 1 current SYSPIV_ERROR_CPM_RET_PTR_NULL BFFC1025 4133 PlsdivCaptureMonData Specify the variable used for read_dat...

Page 143: ...PLING_N OT_COMPLETED BFFC1030 4144 PlsdivCaptureTimeData Execute PlsdivSetSampling before this command SYSPIV_ERROR_CPT_SAMPLING_NUM_DEFIN ITION BFFC1031 4145 PlsdivCaptureTimeData Define the sampling number in PlsdivSetSampling Do not set 0 SYSPIV_ERROR_CPT_MEASURE_ID_NOT_CO MPLETED BFFC1032 4146 PlsdivCaptureTimeData Execute PlsdivMeasureId before this command SYSPIV_ERROR_CPT_SAMPLING_NUM_INCO ...

Page 144: ...divInit before this command SYSPIV_ERROR_FVG_PIV_SET_PULSE_WIDT H_NOT_COMPLETED BFFC1049 4169 PlsdivForceVg Execute PlsdivSetPulseWidth before this command SYSPIV_ERROR_FVG_PIV_SET_VG_LEVEL_N OT_COMPLETED BFFC104A 4170 PlsdivForceVg Execute PlsdivSetVgLevel before this command SYSPIV_ERROR_FVG_PIV_SET_SMTH_NOT_C OMPLETED BFFC104B 4171 PlsdivForceVg Execute PlsdivSetSmoothing before this command SY...

Page 145: ...N_PULSE_C ONFIG_FILE BFFC1057 4183 PlsdivInit gate_pulse cf permission error Set read permission for this user SYSPIV_ERROR_INIT_AN_ERROR_ON_PULSE _CONFIG_FILE BFFC1058 4184 PlsdivInit gate_pulse cf open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_PULSE_ CONFIG_FILE BFFC1059 4185 PlsdivInit gate_pulse cf keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_NO_IN...

Page 146: ...p is not found Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PERMISSION_DIVIDER_ COMP_FILE BFFC1063 4195 PlsdivInit divider cmp permission error Set read permission for this user SYSPIV_ERROR_INIT_AN_ERROR_ON_DIVIDE R_COMP_FILE BFFC1064 4196 PlsdivInit divider cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_DIVIDE R_COMP_FILE BFFC1065 4197 PlsdivInit divider cmp k...

Page 147: ...FC106D 4205 PlsdivInit drain_trans cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_DRAIN _COMP_FILE BFFC106E 4206 PlsdivInit drain_trans cmp keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PULSE_PARAMETER_M ISMATCH_ON_DRAIN_COMP_FILE BFFC106F 4207 PlsdivInit drain_trans cmp pulse parameter mismatch It must be same as the parameter in gate_pulse cf Rein...

Page 148: ...AN_ERROR_ON_EQUIV _Z_FILE BFFC1077 4215 PlsdivInit scope_equiv_z cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_KEYWORD_ON_EQUIV_ Z_FILE BFFC1078 4216 PlsdivInit scope_equiv_z cmp keyword error Reinstall the pulsed IV software SYSPIV_ERROR_INIT_PULSE_PARAMETER_M ISMATCH_ON_EQUIV_Z_FILE BFFC1079 4217 PlsdivInit scope_equiv_z cmp pulse parameter mismatch It must be same as the par...

Page 149: ...8 4232 PlsdivMeasureId Execute PlsdivInit before this command SYSPIV_ERROR_MID_PIV_SET_AVG_NOT_CO MPLETED BFFC1089 4233 PlsdivMeasureId Execute PlsdivSetAveraging before this command SYSPIV_ERROR_MID_PIV_FORCE_VD_NOT_C OMPLETED BFFC108A 4234 PlsdivMeasureId Execute PlsdivForceVd before this command SYSPIV_ERROR_MID_PIV_FORCE_VG_NOT_C OMPLETED BFFC108B 4235 PlsdivMeasureId Execute PlsdivForceVg bef...

Page 150: ... PlsdivScopeZeroCancel scope_mon cmp permission error Set read permission for this user SYSPIV_ERROR_ZSC_AN_ERROR_ON_SCOPE _MON_COMP_FILE BFFC1098 4248 PlsdivScopeZeroCancel scope_mon cmp open error Reinstall the pulsed IV software SYSPIV_ERROR_ST_PIV_INIT_NOT_COMPLET ED BFFC109C 4252 PlsdivSelftest Execute PlsdivInit before this command SYSPIV_ERROR_ST_SMU_SELFTEST_FAILED BFFC109D 4253 PlsdivSelf...

Page 151: ..._OUT_ OF_RANGE BFFC10AE 4270 PlsdivSetDeviceDelay device_delay must be 1 us to 1 us SYSPIV_ERROR_SDD_PIV_INIT_NOT_COMPL ETED BFFC10AF 4271 PlsdivSetDeviceDelay Execute PlsdivInit before this command SYSPIV_ERROR_SMM_ID_CAL_COMP_STAT BFFC10B0 4272 PlsdivSetMeasMode id compensation status must be 0 OFF or 1 ON SYSPIV_ERROR_SMM_ID_LOSS_COMP_STAT BFFC10B1 4273 PlsdivSetMeasMode id loss compensation st...

Page 152: ...ROR_SRR_UPPER_RANGE_RATE_ OUT_OF_RANGE BFFC10C0 4288 PlsdivSetRangingParm Limit to move to upper range must be 0 5 to 1 SYSPIV_ERROR_SRR_LOWER_RANGE_RATE_ OUT_OF_RANGE BFFC10C1 4289 PlsdivSetRangingParm Limit to move to lower range must be 0 5 to 1 SYSPIV_ERROR_SRR_LRR_LARGER_THAN_U RR BFFC10C2 4290 PlsdivSetRangingParm Upper limit must be greater than the lower limit SYSPIV_ERROR_SRR_PIV_INIT_NOT...

Page 153: ...BFFC10D5 4309 PlsdivSetVgLevel Correct the vg_base value It must be same as the system defined value Or turn on the gate voltage adjustment function SYSPIV_ERROR_SVGL_VG_LEVEL_OUT_OF_ RANGE BFFC10D6 4310 PlsdivSetVgLevel Both vg_high and vg_base must be 4 5 V to 4 5 V SYSPIV_ERROR_SVGL_VG_HIGH_SMALLER_ THAN_BASE BFFC10D7 4311 PlsdivSetVgLevel vg_high must be greater than vg_base SYSPIV_ERROR_SVGL_...

Page 154: ... and execute PlsdivInit If the error still remains reinstall the pulsed IV software PIVCOMP_ERROR_GATE_INPUTZ_OUT_OF_LI MIT BFFC10E7 4327 Gate voltage monitor channel Input impedance is out of the limit Connect measurement cables properly PIVCOMP_ERROR_DRAIN_INPUTZ_OUT_OF_L IMIT BFFC10E8 4328 Drain voltage monitor channel Input impedance is out of the limit Connect measurement cables properly PIVC...

Page 155: ...C11F1 4593 Set read permission for Program Files Agilent PLSDIV PLS DIVExe TISExe Spara folder or delete all input_z_chx_yV s1p files and execute PlsdivInit PIVCOMP_ERROR_AN_ERROR_ON_INPUT_Z_ FILE BFFC11F2 4594 Delete all input_z_chx_yV s1p files and execute PlsdivInit If the error still remains reinstall the pulsed IV software PIVCOMP_ERROR_PERMISSION_DRAIN_CAB LING_FILE BFFC11F3 4595 Set read pe...

Page 156: ...INV_ASCII_NUMBER BFFC0E06 3590 ASCII to numeric conversion error DVRPGU_INSTR_ERROR_PARAMETER1 BFFC0E10 3600 Invalid value for parameter 1 DVRPGU_INSTR_ERROR_PARAMETER2 BFFC0E11 3601 Invalid value for parameter 2 DVRPGU_INSTR_ERROR_PARAMETER3 BFFC0E12 3602 Invalid value for parameter 3 DVRPGU_INSTR_ERROR_PARAMETER4 BFFC0E13 3603 Invalid value for parameter 4 DVRPGU_INSTR_ERROR_PARAMETER5 BFFC0E14 ...

Page 157: ...ation file keyword error Reinstall the pulsed IV software DVRPGU_ERROR_GPIB_NUM_ON_CONFIG_FI LE BFFC0E24 3620 Invalid GPIB description Reinstall the pulsed IV software DVRPGU_ERROR_ADDR_ON_CONFIG_FILE BFFC0E25 3621 Invalid BUS address Reinstall the pulsed IV software DVRPGU_ERROR_PGU_TYPE_ON_CONFIG_FI LE BFFC0E26 3622 Invalid PGU type Reinstall the pulsed IV software DVRPGU_ERROR_CHANNEL_ON_CONFIG...

Page 158: ...ROR_DEVICE_NOT_OPENED BFFC0E33 3635 Device is not ready Connect the GPIB cable properly DVRPGU_ERROR_SELF_TEST_FAILED BFFC0E34 3636 Selftest failed DVRPGU_ERROR_SELF_CAL_FAILED BFFC0E35 3637 Calibration failed DVRPGU_ERROR_PERIOD_TOO_LONG BFFC0E40 3648 Period value must be 999 5 s or width 3 03 ns DVRPGU_ERROR_PERIOD_TOO_SHORT BFFC0E41 3649 Period must be 6 06 ns DVRPGU_ERROR_WIDTH_TOO_LONG BFFC0E...

Page 159: ...00 3840 System error occurred DVRSCOPE_INSTR_ERROR_NULL_PTR BFFC0F01 3841 NULL pointer was detected DVRSCOPE_INSTR_ERROR_RESET_FAILED BFFC0F02 3842 Reset operation failed Reboot the instrument DVRSCOPE_INSTR_ERROR_UNEXPECTED BFFC0F03 3843 Unexpected error occurred DVRSCOPE_INSTR_ERROR_DETECTED BFFC0F04 3844 Instrument error occurred DVRSCOPE_INSTR_NO_LAST_COMMA BFFC0F05 3845 Nth comma is not found...

Page 160: ...ameter 15 DVRSCOPE_INSTR_ERROR_PARAMETER16 BFFC0F1F 3871 Invalid value for parameter 16 DVRSCOPE_ERROR_NO_CONFIG_FILE BFFC0F20 3872 Configuration file is not found Reinstall the pulsed IV software DVRSCOPE_ERROR_PERMISSION_CONFIG_FIL E BFFC0F21 3873 Configuration file permission error Set read permission for this user DVRSCOPE_ERROR_AN_ERROR_ON_CONFIG_F ILE BFFC0F22 3874 Configuration file open er...

Page 161: ... timeout value DVRSCOPE_ERROR_MARKER_TYPE BFFC0F44 3908 Marker name must be A or B DVRSCOPE_ERROR_MARKER_POS BFFC0F45 3909 Change time value to display the marker in this time frame DVRSCOPE_ERROR_SAMPLING_RATE BFFC0F46 3910 Sampling rate must be 20 GSa s DVRSCOPE_ERROR_SAMPLING_NUMBER BFFC0F47 3911 Sampling number must be 262144 DVRSCOPE_ERROR_AVERAGING BFFC0F48 3912 Averaging number must be 1 to...

Page 162: ...t exceed the displayed scale Or it must be 5 to 5 V for the external trigger source DVRSCOPE_ERROR_TRIGGER_SOURCE_INVALI D BFFC0F53 3923 Invalid trigger configuration Not available for the LINE trigger source DVRSCOPE_ERROR_SWEEP_TIME_OUT BFFC0F54 3924 Change timeout value DVRSCOPE_ERROR_SKEW_VAL BFFC0F55 3925 Skew value must be 50 us to 150 us for 54853 4 5A or 25 us to 25 us for 80000B series DV...

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