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230
5977B Series MSD Troubleshooting and Maintenance Manual
9
Parts
Vacuum System
This section lists replacement parts available for the vacuum system. It
includes, O-rings and seals (
on page 230), standard foreline pump
and related components (
dry foreline pump and related components (
on page 235), diffusion pump
and related components (
and turbo pump vacuum system components (
O-rings and seals
Table 18
O-rings and seals
Description
Part number
Calibration valve O-ring (1/4-inch)
5180-4182
KF10/16 seal (foreline pump inlet), Micro-Ion vacuum
gauge
KC16AV
KF10/16 seal (foreline pump inlet and diffusion pump
outlet), Micro-Ion vacuum gauge
KC16AV
KF50 seal (diffusion pump inlet)
0100-1884
Side plate O-ring
0905-1442
Vent valve O-ring (1/4-inch)
5180-4182
Summary of Contents for 5977B Series
Page 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 8: ...8 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Page 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Page 88: ...88 3 CI Troubleshooting ...
Page 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Page 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Page 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Page 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Page 256: ...256 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts ...
Page 257: ......