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Parts
9
5977B Series MSD Troubleshooting and Maintenance Manual
237
Turbo pump and related parts
Table 23
Turbo pump MSD vacuum system components (
Description
Part number
Turbomolecular pump
G3170-80162
Pfeiffer HiPace 300 turbo pump- Rebuilt
G3170-89162
Turbo power assembly
G3170-60600
Centering ring seal with screen
0905-1613
Figure 59
Turbo pump and related parts
Turbo Pump
Ion gauge assembly
Summary of Contents for 5977B Series
Page 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 8: ...8 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Page 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Page 88: ...88 3 CI Troubleshooting ...
Page 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Page 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Page 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Page 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Page 256: ...256 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts ...
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