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Table of Contents
ZEISS
SmartSEM User Interface....................................................................... 71
Graphical Control Elements ................................................................... 72
User Access Levels and User Privileges................................................... 73
SmartSEM Program Suite ...................................................................... 74
5 Commissioning and First Operating Steps....................................... 77
Prerequisites for Commissioning and Operation .................................................. 78
Energizing the Microscope .................................................................... 78
Starting the Microscope ........................................................................ 80
Keyboard Shortcuts............................................................................... 82
Acquiring an Image............................................................................................. 83
5.4.1
Preparing the Specimen Holder ............................................................. 84
Loading the Specimen Chamber............................................................ 85
Locating the Specimen .......................................................................... 89
Switching on the Gun ........................................................................... 90
Switching on the EHT............................................................................ 90
Acquiring an Image............................................................................... 91
Optimizing the Image............................................................................ 93
Selecting the Gun Mode........................................................................ 96
Measuring the Probe Current ................................................................ 97
Setting the Probe Current...................................................................... 98
Continuously Modifying the Probe Current (License: OPTIPROBE) .......... 98
Changing the Extractor Voltage ............................................................ 98
Setting up the InLens SE Detector ......................................................... 100
Setting up the InLensDuo Detector........................................................ 100
Setting up the SE Detector .................................................................... 101
Setting up the VPSE Detector ................................................................ 102
Setting up the C2D Detector ................................................................. 103
Setting up the aBSD1-LH Detector......................................................... 104
Setting up the HDAsB Detector ............................................................. 105
Setting up the Manually Insertable BSD Detector................................... 107
Changing to Standard VP Mode ............................................................ 109
Returning to HV Mode .......................................................................... 110
Using the Optional Airlock .................................................................... 110
Using the Optional Plasma Cleaner........................................................ 118
Using the Optional Raman Spectroscopic Microscope ........................... 122
Finishing the Work Session.................................................................... 126
Closing the SmartSEM User Interface .................................................... 127
De-energizing the Microscope............................................................... 128
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006