Zeiss SIGMA Series, Instruction Manual

Page: 37 / 170

ZEISS 3 Product and Functional Description | 3.2 Main Components
Standard Detectors Detected Signals Typical Application
Everhart-Thornley type Surface structure
Compositional contrast
Optional Detectors Detected Signals Typical Application
VPSE Detector [
}
49]
optional, on VP systems only
SE2 Variable pressure
Topography and surface
structure in VP mode
C2D Detector [
}
52]
optional, on VP systems only
SE Variable pressure
Topography and surface
structure in VP mode
InLens Duo Detector [
}
56]
optional, only Sigma 500
SE1
BSE
Surface structure
Material contrast
Compositional contrast
BSE Detectors [
}
57]
including HDBSD, aBSD1-LH
Detector [
}
63] , and HDAsB
Detector [
}
64]
BSE Topographical (crystal orien-
tation)
Compositional contrast
YAG BSD Detector [
}
65] BSE Compositional contrast
Electron backscatter diffrac-
tion (EBSD) detector BSE camera Metallurgy, geology, and
electronics
Kikuchi patterns, crystallo-
graphic orientation and tex-
ture, grain size
STEM Detector [
}
65]
Scanning Transmission Elec-
tron Microscopy detector
Transmitted electrons Transmission imaging of ul-
trathin sections in biological
and mineralogical examina-
tions
CL Detector [
}
67]
Cathodoluminscence detec-
tor
Light photons Mineralogy
SCD Detector [
}
67]
Specimen current detector
(SCD)
Absorbed electrons Electron beam induced cur-
rent (EBIC)
Wavelength dispersive X-ray
detector (WDX) X-ray Materials elemental composi-
tion evaluation
Energy dispersive X-ray de-
tector (EDX) X-ray Materials elemental composi-
tion evaluation
For more details, refer to the document Product Specification of the microscope.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 37