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3 Product and Functional Description | 3.2 Main Components
ZEISS
Effect BSE Detector
The BSE detector is located directly below the objective lens. The BSE detector may therefore in-
fluence the electrostatic field of the objective lens and affect the efficiency of the InLens SE detec-
tor.
The presence of a BSE detector may also prevent imaging at very short working distances, which
reduces the efficiency of the InLens SE detector (this applies only to the retractable BSE detectors).
When using only the InLens SE detector for imaging, it is recommended to move the BSE detector
to its parking position in order to reduce the working distance and to increase the efficiency of
the InLens SE detector.
Fig. 18: Effect on electrostatic field by the
detector
3.2.5.3.2 Benefits of the InLens SE Detector
The main benefit of the InLens SE detector is its high detection efficiency, particularly at very low
acceleration voltages, and the almost pure detection of secondary electrons.
Surface Detail
Fig. 19: Comparison of surface information at high acceleration voltages. InLens
detector (left): Clear edge effect
with good imaging of the surface structures.
detector (right): Little surface information. Acceleration voltages: 10
kV.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006