5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
ZEISS
3. To create a new recipe, click
Add
.
à
The
Cleaning Recipe
window is displayed.
4. Enter a name for the cleaning recipe.
5. Select the desired values according to your specific application.
In particular, the plasma power and the plasma time can be changed for the customized
recipes.
6. If a plasma cleaner with purge option is installed and if nitrogen purge cycles are necessary,
activate the
Purge
checkbox.
à
This adds additional values that can be edited.
7. If required, activate
T pump mode
.
This option provides a faster cleaning at better vacuum.
8. Once the settings are complete, click
Ok
.
à
The recipe is added to the list of available recipes.
à
In the
Type
column, the new recipe is displayed as
User
, which tells you that the recipe
can be edited or deleted.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
