5 Commissioning and First Operating Steps | 5.4 Acquiring an Image
ZEISS
5.4.7.3 Limiting the Scan Field
Prerequisite
ü
Adjusting the size and position of the small frame (reduced raster) requires the license RE-
DUCED.
Procedure
1. In the
Toolbar
, click the REDUCE icon.
à
A small scan frame is displayed. This frame defines the specimen area to be scanned by
the electron beam.
à
The image outside the scan frame is frozen.
2. To change the position of the scan frame, click on the green border line and use the mouse
to drag and drop the frame.
3. To change the size of the scan frame, click on the small blue squares on the green border
line and drag them to the desired size.
4. Focus the image in the reduced raster.
5.4.7.4 Aligning the Aperture
Info
Alternatively to aligning the aperture manually, use the Auto Wobble function via toolbar icon.
Procedure
1. In the SEM Controls panel, select the Apertures tab.
2. Activate the
Focus Wobble
checkbox.
INFO:
Focus wobble is a function that sweeps the acceleration voltage. If the aperture is
misaligned, a lateral and vertical shift can be observed.
3. To adjust the wobble intensity, use the
Wobble Amplitude
scroll bar.
4. To accelerate the wobble speed, activate the
Wobble Fast
checkbox.
5. Click
Aperture Align
.
6. In the
Aperture Align
navigation box, use the scroll bars or the red marker to adjust the
aperture alignment until there is no movement of the detail in X- and Y-direction.
INFO:
The specimen detail should just be pulsating without shifting.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
