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ZEISS
3 Product and Functional Description | 3.2 Main Components
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Fig. 13: Interaction between primary electron beam and specimen
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Objective lens
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Interaction volume
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Specimen
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Fig. 14: Interaction between primary electron beam and specimen
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Primary electrons
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Auger electrons
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Secondary electrons
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Backscattered electrons
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Characteristic X-rays
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Continuum X-rays
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Fluorescent X-rays
Primary Electrons
Primary Electrons (PEs) are electrons forming the scanning beam before hitting the specimen.
Secondary
Electrons
Secondary electrons are emitted from the topmost layer of the specimen.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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