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ZEISS
9 Technical Data and Conformity | 9.3 Installation Requirements
Cooling Water
Major components of the microscope such as electron-optic lenses, parts of the electronics and
the turbo molecular pump are water-cooled. Any cooling solution has to fulfil the following re-
quirements.
Parameter
Requirement
Water flow rate
> 1.5 l/min
Pressure
2–3 bar
Water tempera-
ture
18–22 °C
Stability
0.5 °C/10 min
Heat dissipation
1 kW
Connection hose
8 mm inside diameter. One 25 m roll is delivered with the microscope.
Instrument con-
nection
Quick exchange connectors. Two are delivered with the microscope.
Nitrogen
Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange. The nitro-
gen can be taken either from a gas cylinder or from an in-house supply system.
The connection must be equipped with an appropriate pressure reducer and a shut-off valve that
is secured against accidental re-activation.
Parameter
Requirement
Flow rate
Approx. 3 l/min for ventilation of specimen chamber with chamber
door open
Pressure
0.2–3.3 bar
Quality
4.6 with nitrogen content > 99.996 %
Connection hose
4 mm inside diameter. 10 m are delivered with the microscope.
Instrument con-
nection
Quick exchange connector. One is delivered with the microscope.
Compressed Air
Compressed air is used to operate several valves and the auto leveling system. The necessary com-
pressed air can be either generated by a compressor (part no. 345596-0000-000) or taken from a
gas cylinder or from an in-house supply system.
The connection must be equipped with an appropriate pressure reducer and a shut-off valve that
can be secured against accidental re-activation.
Parameter
Requirement
Typical flow rate
Less than 1 l/min during normal operation
Pressure
0.6–0.8 MPa (6–8 bar)
Quality
Oil-free
Connection hose
4 mm inside diameter. 10 m of pipe are delivered with the micro-
scope.
Instrument con-
nection
Quick exchange connector. One is delivered with the microscope.
INFO:
Due to acoustic noise and vibrations the compressor – if used –
should be installed in a separate room.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
157