9 Technical Data and Conformity | 9.2 Performance Data and Specifications | Sigma 500 and Sigma 500 VP
ZEISS
Parameter
Description
Objective lens
Type:
Gemini electromagnetic/electrostatic objective lens system (80º
conical final lens) with water cooling for best thermal stability and re-
producibility
Focus
Working distance:
Range from 0.1 mm to 50 mm, depending on
operating conditions and stage configuration
Focus compensation:
Automatic compensation to minimize focus
changes over the entire acceleration voltage range
Dynamic focus:
For correction of focus on tilted specimens
Focus wobble:
For assistance in aperture alignment, with adjustable
amplitude and speed
Rotation compensation:
Automatic correction of apparent image
rotation with changes in working distance
Beam shift
For precise adjustment of image position at high magnifications
Maximum scan
speed
50 ns/pixel
Image framestore
4:3 format with 16 bit dynamic range
§
1024 × 768 pixels
§
2048 × 1536 pixels
§
3072 × 2304 pixels
§
4096 × 3072 pixels
§
6144 × 4608 pixels
§
8192 × 6144 pixels
§
12288 × 9216 pixels
§
24576 × 18432 pixels
§
32768 × 24576 pixels
Dual channel and quad mode are only available for maximum
12k × 9k and scan speed 2 upwards.
32k × 9k is only available for normal scans, scan speed 2 upwards.
DCFA is limited to maximum 4k × 3k.
32k × 24k can only be used for SmartSEM (not in combination with
Zen applications).
System control
SmartSEM user interface operated by mouse and keyboard
Windows 10 multilingual operating system
Specimen Chamber
and Stage
Parameter
Description
Specimen chamber
dimensions
§
358 mm inner diameter
§
270.5 mm height
Free accessory
ports
14
Dedicated EDS
ports
2
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
