ZEISS
5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
7. To choose the respective mode, click
BSD: COMPO
or
BSD: TOPO
.
The default setting for aBSD1-LH is
BSD: COMPO
. All five segments (S1–S5) are set to
on
and an image that is high in atomic number contrast is obtained.
The default mode for
BSD: TOPO
is S1 off, S2 on, S3 on, S4 inv and S5 inv.
8. If you want to change the default setting to
BSD: TOPO
, click
BSD: Set TOPO
.
9. From the
BSD Gain
drop-down list, select
Low
,
Medium
,
High
, or
Very High
.
INFO:
Since the detector has a limited speed, it is recommended to use scan speed 6 or
higher (slower), especially at small magnifications. The lower the gain is, the faster is the
detector.
5.6.8 Setting up the HDAsB Detector
The HDAsB detector is optionally available.
The HDAsB detector enables four outputs that can be used either for compositional imaging or
for topographical imaging.
Fig. 70: The crystalline structure of a silicon device
The following settings are recommended for the HDAsB detector:
Detector Settings
1.5 kV – 30 kV
3–10 mm
§
Use compositional mode for obtaining an
image that is high in atomic number con-
trast.
§
Use topography mode for showing sur-
face details.
§
Use individual settings for channeling
contrast.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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