7 Troubleshooting | 7.3 Power Circuit
ZEISS
7.2.2 Calibrating OptiProbe
After cathode replacement or after re-alignment of the electron optic column, OptiProbe has to
be calibrated. A calibration wizard facilitates the calibration procedure.
Parts and Tools
Designation
Part no.
Faraday Cup
orifice diameter at least 200 μm
348342-8055-000
Procedure
1. Load the Faraday cup into the specimen chamber.
2. Set WD = 5 mm and select spot mode.
3. Focus the spot into the orifice of the Faraday cup.
4. From the Windows start menu, select
SmartSEM > OptiProbe Calibration
.
à
The
OptiProbeCal
dialog is displayed.
5. Click
OK
.
à
The
OptiProbeCal
window is displayed.
6. To start the calibration, click
Start
.
à
The
User Action
window is displayed.
7. Click
OK
.
à
An automatic calibration routine is performed, which takes about fifteen minutes.
à
When the calibration procedure is finished, a message is displayed.
8. To finish the dialog, click
Yes
.
à
Now OptiProbe is ready to be used.
7.3 Power Circuit
7.3.1 Checking the Position of the Circuit Breakers
NOTICE
Persisting electrical problems
Tripped circuit breakers or blown fuses may be a hint for an electrical problem in the micro-
scope.
4
If a circuit breaker keeps tripping or a fuse keeps blowing, de-energize the microscope
completely and contact your ZEISS service representative for assistance.
No.
Value
Type
Circuit
F10
10 A
Circuit breaker
Plinth electronics, PC
F12
10 A
Fuse
Rotary pump 1
Procedure
1. Check if the circuit breaker (F10) on the rear
side of the plinth is tripped.
2. If the circuit breaker is tripped, push the circuit breaker upwards.
3. If the rotary pump 1 is not working, check and possibly replace the fuse (F12).
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
