ZEISS
5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
Info
The newly set extractor value is only valid for the current work session. After a restart of the
SmartSEM software, the microscope restores the nominal extractor voltage.
Info
Reducing the extractor voltage may impair the performance and resolution of the microscope.
4
Avoid reducing the extractor voltage.
4
If at all, reduce the extractor voltage only for a short time (1–2 h) and by maximum 500 V.
Prerequisite
ü
The user privilege
Extractor
is required to change the extractor voltage.
Procedure
1. From the
Menu Bar
, select
Beam > Gun Setup
.
à
The
Gun Service
dialog is displayed.
2. To increase the extractor voltage, double-click the
Extractor V Target
readout.
à
The
Extractor V Target
window is displayed.
3. Enter a higher value.
4. Click
OK
.
After you change the extractor voltage, calibrate the probe current, refer to
5.6 Finding Appropriate Detector Settings
5.6.1 Selecting a Detector
You need to select an appropriate detector depending on the application and the pressure mode.
In addition to the standard SE detector, several optional detectors are available.
For information on special set-up procedures for the detectors, refer to:
§
Setting up the InLens SE Detector [
§
Setting up the InLensDuo Detector [
§
§
Setting up the VPSE Detector [
§
§
Setting up the HDAsB Detector [
§
Setting up the aBSD1-LH Detector [
§
Setting up the Manually Insertable BSD Detector [
§
Setting up the YAG BSD Detector [
§
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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