ZEISS
5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
Fig. 64: Co-Re alloy at 1.5 kV, low magnification,
Fig. 65: Co-Re alloy 1.5 kV, high magnification,
The following settings are recommended for the InLensDuo detector:
Filtering Grid
500 V – 10 kV
0–5 mm
BSE Mode
InLensDuo Grid > 400 V to filter out the SE
signal
20 V – 500 V
0–3 mm
SE Mode
InLensDuo Grid = 0 V for the use as an addi-
tional SE detector, like an InLens SE detector,
refer to
Setting up the InLens SE Detector
Info
Short working distances are preferable for good detection efficiency.
Avoid strong specimen tilting for the InLens Duo detector.
Procedure
1. In the SEM Controls panel, select the Detectors tab.
2. From the
Signal A
drop-down list, select
InLensDuo
.
3. To work in BSE mode, activate
BSE Mode
.
To work in SE mode, deactivate
BSE Mode
.
4. Adjust the EHT, the working distance (WD) and the InLens Duo grid voltage according to
the suggestions in the table in order to optimize the image.
5.6.4 Setting up the SE Detector
The SE detector collects the SE signal, highlighting the topography of the specimen.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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