5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
ZEISS
Procedure
1. Select the Detectors tab of the SEM Controls panel.
2. Select the detector from the
Signal A
drop-
down list.
5.6.2 Setting up the InLens SE Detector
The InLens SE detector collects the SE signal, acquiring mainly information about surface topogra-
phy.
Fig. 63: Silver nanoparticles embedded in zeolite, imaged at 1.5 kV.
The following settings are recommended for the InLens SE detector:
20 V – 10 kV
0–5 mm *
Short working distances are preferable for
good detection efficiency
10 kV – 20 kV
2–5 mm
* At EHTs between 20 V and 0.5 kV, a WD of exactly 0 is not possible.
Info
Avoid strong specimen tilting for the InLens SE detector.
Procedure
1. In the SEM Controls panel, select the Detectors tab.
2. From the
Signal A
drop-down list, select
InLens
.
3. Adjust the EHT and the working distance (WD) according to the suggestions in the table in
order to optimize the image.
5.6.3 Setting up the InLensDuo Detector
The InLens Duo detector allows imaging and mixing of a high contrast topography (SE) as well as
clear compositional contrast (BSE). In the BSE image, heavy elements are represented by brighter
pixels and light elements are represented by darker pixels. By adjusting the filtering grid, energy-
selected BSE images can be obtained. If the filtering grid voltage is set to 0, SE and BSE mixed im-
ages can be acquired.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
