5 Commissioning and First Operating Steps | 5.6 Finding Appropriate Detector Settings
ZEISS
5.6.10 Setting up the YAG BSD Detector
NOTICE
When you manually insert the detector, there is a risk to damage the YAG BSD detector.
4
Use the chamberscope image to observe if there is enough space between the objective
lens and the specimen.
4
If there is not enough space between the objective lens and the specimen, then lower the
stage position before you insert the detector.
4
Insert the YAG BSD detector carefully and observe the moving YAG BSD detector via the
chamberscope.
Procedure
1. Insert the detector.
If there is any resistance, make sure the silver
knob is untightened.
2. In the SEM Controls panel, select the
Detectors
tab.
3. From the
Signal A
drop-down list, select
YAG BSD
.
4. To optimize the image, adjust brightness and contrast. There are no further parameters to
change.
5. After use, retract the detector.
INFO:
Because of the detector’s weight, there is only little risk for it to accidentally slide in.
Therefore, you do not have to fix the silver knob.
5.6.11 Setting up the CL Detector
The CL detector is optionally available.
The CL detector collects visible or ultraviolet light and is especially useful for internal structural ex-
aminations of rocks, ceramics, and semiconductors.
Fig. 71: Zircon grains
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
