5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
ZEISS
à
The transition is indicated in the status bar of the SmartSEM software.
3. Wait until the system is ready for VP operation and
Chamber Status = At VP
is displayed.
à
This takes approximately 20 s.
4. To change the chamber pressure, use the
VP Target
scroll bar.
Alternatively double-click into the
VP Target
field, enter desired pressure value and click
OK
.
Refer to
Working with Variable Pressure [
to determine the correct pressure value.
5.7.2 Returning to HV Mode
HV mode is the standard mode of a FESEM. It offers the possibility of analyzing and mapping con-
ducting specimens. In HV mode, the pressure in the specimen chamber is less than 10⁻⁶ mbar.
Info
When switching from VP to HV mode, the column chamber valve closes automatically, as a rel-
atively poor vacuum is available in the specimen chamber when opening the TIV.
Prerequisite
ü
The microscope is operating in VP vacuum mode
Procedure
1. In the SEM Controls panel, select the Vacuum tab.
2. In the
Variable Pressure
section, click
HV
.
à
The transition is indicated in the status bar of the SmartSEM software.
This takes approximately 20 s.
5.8 Working with Optional Accessories
5.8.1 Using the Optional Airlock
5.8.1.1 Unloading the Specimen Using an Airlock
You can unload the specimen either manually or with pre-defined airlock macros to simplify the
specimen exchange.
This procedure consists of the following steps:
§
Driving the specimen holder to the transfer position.
Driving to Transfer Position via Airlock Macros [
or to
Position without Airlock Macros [
§
Unloading the Specimen Holder from the Airlock [
5.8.1.1.1 Driving to Transfer Position via Airlock Macros
Prerequisite
ü
A specimen is loaded in the specimen chamber and is to be exchanged for another specimen.
Procedure
1. To open the
Stage Navigation Bar
, navigate to
View > Toolbars
and activate
Stage
Navigation Bar (for Widescreen users)
. Alternatively, you can access the
Stage Naviga-
tion Bar
via
Stage > Navigation
.
à
The
Stage Navigation Bar
is displayed.
2. From the
Panel Configuration Bar
, select
Airlock
.
3. Click
Specimen Change
to start the pre-defined macro.
INFO:
The airlock macros can be modified according to your individual requirements. Con-
tact your local ZEISS service representative for assistance.
The macro automatically performs the following actions:
à
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006