ZEISS
3 Product and Functional Description | 3.2 Main Components
Topographic
Contrast
Because the InLens SE detector views the specimen from directly above, images obtained by this
detector seem to be “flat” and contain only little information about the topography. However,
surface-specific information is detected sufficiently well. In comparison to the InLens SE detector,
the SE detector emphasizes topography. The electrons penetrate deeper into the specimen and a
large number of backscattered electrons contribute to the image information. Generally, more sig-
nal can be obtained from surfaces that are tilted towards the detector.
Fig. 25: Comparison of topographic contrast of a fracture surface. InLens
detector (left): Significant edge effect,
low topographic contrast.
detector (right): Good topographic imaging. Acceleration voltages: 15 kV
Fig. 26: Comparison of topographic contrast of an integrated circuit: InLens
detector (left): Good imaging of sur-
face structures, low topographic contrast.
detector (right): Good topographic imaging. Acceleration voltages: 15
kV
The InLens SE detector is not always the appropriate detector for image navigation at low magni-
fications:
§
It requires the use of a small working distance, which limits the smallest possible magnifica-
tion.
§
A small spot can appear in the center of the image field at very low magnifications.
Whether or not such a spot appears strongly depends on the geometry of the specimen, on
the working distance, and on the selected acceleration voltage.
The SE detector is most suitable for generating images with a large field-of-view for navigating on
the specimen surface and for using long working distances.
Parameter
Recommended conditions
Acceleration voltage
0.02 kV to 20 kV
Suitable up to 20 kV, at more than 20 kV the beam booster is
switched off
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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