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ZEISS
5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
3. From the
Panel Configuration Bar
, select
Plasma Cleaning
.
à
The
Plasma Cleaning
panel is displayed.
4. Check that the Plasma Cleaner controller hard-
ware is switched on and the
Connected
LED is
active in the software.
5. From the
Recipe
drop-down list, select a
recipe.
INFO:
There are several preset recipes for dif-
ferent purposes that cannot be edited. Addi-
tionally, you can create custom recipes.
6. To start the plasma cleaning, click
Start clean-
ing
.
à
The current status is displayed in the
Plasma Cleaning Sequence
section.
à
If the selected recipe involves nitrogen purges, the number of purge cycles is displayed
next to the flow chart. The arrow indicates which steps will be repeated.
7. Wait until the
Finished
LED is active.
This indicates that the plasma cleaning process is complete.
INFO:
If you wish to abort the cleaning cycle while it is still running, click
Stop cleaning
.
à
The chamber is pumped.
8. Wait until
Vac Status = Ready
is displayed in the
Vacuum
tab of the SEM Controls panel.
à
The gun and the EHT can then be switched back on and you can return to regular micro-
scope operation. Refer to
.
5.8.2.2 Creating Custom Recipes
There are several preset recipes for different purposes that cover most applications. Additionally,
you can create custom recipes for special purposes.
Procedure
1. From the
Panel Configuration Bar
, select
Plasma Cleaning
.
à
The
Plasma Cleaning
panel is displayed.
2. Click
Edit Recipes
.
à
The
Plasma Cleaning Recipe List
is displayed and displays the available recipes.
INFO:
The preset recipes are marked as
Fixed
in the
Type
column and cannot be edited
or deleted.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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