Zeiss SIGMA Series, Instruction Manual

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ZEISS 5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
5.8.2.3 Setting up the Schedule
If you want to schedule the next plasma cleaning, you can set up a date and time for an auto-
mated decontamination cycle.
NOTICE
Plasma cleaning
Plasma can damage sensitive specimens.
4
Always test the plasma cleaner on specimens of the same material before cleaning any im-
portant specimen.
NOTICE
Gases
Unstable pressure or unwanted reactions between the plasma and gases injected into the
chamber can damage the specimen or the vacuum system.
If a gas injection system or the charge compensation function are active, the gas injection af-
fects the pressure range and can create unwanted reactions between the plasma and the in-
jected gas.
4
Make sure the chamber pressure is stable during plasma cleaning.
4
Do not use the GIS or the charge compensator when using the plasma cleaner.
Procedure 1. From the Panel Configuration Bar , select Plasma Cleaning .
à The Plasma Cleaning panel is displayed.
2. To select a date for your cleaning schedule, click the Calendar icon.
3. In the input field on the left side of the Calendar icon, enter a time.
4. Activate the Schedule cleaning cycle at: checkbox.
à
The cleaning cycle schedule is now active. 30 seconds before the scheduled cleaning cy-
cle, a countdown will be displayed to inform you that a cleaning cycle is about to start.
5. To abort the countdown and start the cleaning cycle right away, click Start Now .
6. To abort the countdown and cancel the scheduled cleaning cycle, click Cancel .
7. To start the cleaning cycle as scheduled, no action needs to be taken.
5.8.2.4 Returning to Regular Operation
Procedure 1. If a cleaning cycle is currently running, click Stop cleaning to abort the cleaning cycle.
2. Close the Plasma Cleaning window.
à The chamber is pumped.
3. Wait until Vac Status = Ready is displayed in the Vacuum tab of the SEM Controls panel.
4. Switch on gun and EHT. Refer to Switching on the Gun [
}
90] and Switching on the EHT
[
}
90] .
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 121