5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
ZEISS
5.8.3 Using the Optional Raman Spectroscopic Microscope
5.8.3.1 Acquiring an Image with the Optional Raman Spectroscopic Microscope
Raman spectroscopy is a non-destructive analytical technique that can be used to identify and im-
age various material parameters, such as chemical composition and crystallographic orientation.
The specimen is illuminated with a monochromatic laser beam, which interacts with the molecules
of the specimen. The spectrum of the scattered light is analyzed.
The stage position and working distance of the SEM and the Raman spectroscopic microscope are
not identical:
Prerequisite
ü
SmartSEM is started
Procedure
1. Open the
SEM Raman Correlation
window.
à
INFO:
The scan rotation is automatically adjusted to match the different rotations of the
Raman microscope and the SEM. Do not change the scan rotation.
2. Activate the
Use auto calibration data
check-
box.
3. Use the dual joystick to shift the specimen in X direction and in Y direction until the region
of interest on the specimen is centered.
4. Use the dual joystick to shift the specimen in Z
direction until the image is roughly in focus.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
