ZEISS
3 Product and Functional Description | 3.3 Optional Components and Accessories
3.3.1.3 YAG BSD Detector
Purpose
The YAG BSD detector is a scintillation type detector for backscattered electrons.
The YAG BSD detector has a high sensitivity and is specifically designed for high speed imaging.
It can be used in HV mode and in VP mode.
Function
The YAG BSD detector uses yttrium aluminum garnet (YAG) as a fast scintillation material that is
mechanically and chemically resistant. Since it is a scintillation type detector, the YAG BSD detec-
tor does not have segments with changeable polarity and you can only use this detector for com-
position imaging. In comparison to segment based BSD detectors, the YAG BSD detector has a
faster response time.
3.3.1.4 STEM Detector
Purpose
The optional STEM (Scanning Transmission Electron Microscopy) detector is an electron detector
that can be used to detect transmitted and scattered electrons underneath an ultrathin specimen.
The STEM unit is equipped with diodes that are switched on or off in order to allow dark field and
bright field imaging.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
65
