ZEISS
9 Technical Data and Conformity | 9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP
Parameter
Description
Dedicated EDS
ports
1
Analytical working
distance
8.5 mm
Specimen stage
Type:
5-axes motorized Cartesian controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting:
Drawer-type door
Movements:
§
§
Z = 50 mm
§
T = −10° to 90°
§
R = 360° continuous
INFO:
The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Accessory ports:
Two accessory ports on the stage door are pro-
vided
Specimen weight:
Up to 0.5 kg all axes, up to 2 kg without tilt, up
to 5 kg on XY platform only
Specimen current monitor
with integrated
Touch Alarm
(audible
touch alarm warning with on-screen message)
Specimen mounts:
One carousel 9x specimen holder for 13 mm di-
ameter stubs included in base tool configuration, various specimen
holders available as option
Plasma cleaner
(optional)
Integrated plasma cleaner:
Chamber mounted plasma cleaner for
removal of hydrocarbon contamination from both specimen and
chamber; integrated software control for user defined cleaning cycles
without user interaction after starting the cleaning process
Vacuum Modes
§
High vacuum
§
Variable pressure (optional) 10–133 Pa
Detection System
Parameter
Description
InLens detectors
InLens SE detector:
High efficiency annular scintillator detector mounted in Gemini col-
umn with optically coupled photomultiplier.
Chamber detectors
SE detector:
Everhart-Thornley SE detector with optically coupled photomultiplier;
collector bias adjustable from −250 to +400 V
VPSE detector
(optional, only for VP mode):
Fourth generation variable pressure secondary electron detector for
imaging in VP mode with up to 85 % improvement in Weber contrast
ratio
C2D detector
(optional; only for VP mode):
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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