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ZEISS
Table of Contents
6 Care and Maintenance ....................................................................130
Change of Consumables and Chemicals ................................................ 130
Servicing the Pre-vacuum Pump ............................................................ 131
Care and Cleaning Work .....................................................................................131
6.4.1
Cleaning the Microscope....................................................................... 132
7 Troubleshooting .............................................................................133
Defining the Post Initialization Position of the Stage.............................. 135
Changing the Joystick TV Angle ............................................................ 135
Resetting the Touch Alarm .................................................................... 136
Checking the Water Flow and Temperature .......................................... 136
Replacing the Chamber Door Seal ......................................................... 137
Baking out the Gun Head...................................................................... 138
Checking the Position of the Circuit Breakers ........................................ 140
8 Decommissioning and Disposal.......................................................143
9 Technical Data and Conformity.......................................................147
Performance Data and Specifications | Sigma 300 and Sigma 300 VP..................147
Performance Data and Specifications | Sigma 500 and Sigma 500 VP..................151
Installation Requirements ....................................................................................155
9.3.1
Layout and Connections........................................................................ 159
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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