Zeiss SIGMA Series, Instruction Manual

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ZEISS Table of Contents
6 Care and Maintenance ....................................................................130
6.1 Safety During Cleaning and Maintenance............................................................130
6.2 Maintenance Schedule ........................................................................................130
6.3 Maintenance Work .............................................................................................130
6.3.1
Change of Consumables and Chemicals ................................................ 130
6.3.2 Servicing the Pre-vacuum Pump ............................................................ 131
6.4 Care and Cleaning Work .....................................................................................131
6.4.1
Cleaning the Microscope....................................................................... 132
7 Troubleshooting .............................................................................133
7.1 Chamber.............................................................................................................134
7.1.1
Initializing the Stage.............................................................................. 134
7.1.2 Defining the Post Initialization Position of the Stage.............................. 135
7.1.3 Changing the Joystick TV Angle ............................................................ 135
7.1.4 Resetting the Touch Alarm .................................................................... 136
7.1.5 Checking the Water Flow and Temperature .......................................... 136
7.1.6 Replacing the Chamber Door Seal ......................................................... 137
7.2 Column ...............................................................................................................138
7.2.1
Baking out the Gun Head...................................................................... 138
7.2.2 Calibrating OptiProbe............................................................................ 140
7.3 Power Circuit ......................................................................................................140
7.3.1
Checking the Position of the Circuit Breakers ........................................ 140
7.4 Detectors ............................................................................................................141
7.4.1
Lubricating the Rod............................................................................... 141
7.5 PC.......................................................................................................................142
7.5.1
Cleaning up the PC ............................................................................... 142
8 Decommissioning and Disposal.......................................................143
8.1 Decommissioning................................................................................................143
8.2 Transport and Storage ........................................................................................144
8.3 Disposal ..............................................................................................................146
8.4 Decontamination ................................................................................................146
9 Technical Data and Conformity.......................................................147
9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP..................147
9.2 Performance Data and Specifications | Sigma 500 and Sigma 500 VP..................151
9.3 Installation Requirements ....................................................................................155
9.3.1
Layout and Connections........................................................................ 159
9.3.2 System Layout....................................................................................... 160
9.4 Applicable Standards and Regulations.................................................................161
10 Parts and Tools ...............................................................................162
10.1 Tools and Accessories .........................................................................................162
Glossary ..........................................................................................163
Index...............................................................................................167
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 5