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Zeiss SIGMA Series, Instruction Manual

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ZEISS

9 Technical Data and Conformity | 9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP

9 Technical Data and Conformity

This chapter contains important technical data as well as information on the conformity.

9.1 Performance Data and Specifications | Sigma 300 and Sigma 300 VP

The Microscope System must only be operated in closed rooms. It is recommended to install the
Microscope System in a dark room where artificial illumination, sunlight or other light sources
cannot interfere with image acquisition. The Microscope System should not be installed near win-
dows with direct sunlight or radiators. Compliance with the installation requirements of the Mi-
croscope System and the availability of the requested supplies is the responsibility of the customer
and has to be provided at the time of installation. Due to continuous development, we reserve the
right to change specifications without notice.

The Microscope System must be plugged into a properly installed power socket with protective
earth contact using the supplied mains cable. The protective earth connection must not be im-
paired by the use of extension cables.

Info

Your ZEISS Sales & Service Partner will provide you with the detailed installation requirements.

Weight and Sizes

Main Components

Length
(mm)

Width (mm)

Height
(mm)

Weight (kg)

column

822

960

1757

636

Table + PC

1133

1076

826

85

Static damping block

180

180

160

44

Quiet mode option

324

324

300

17.0

Pre-vacuum pump

430

250

290

26

Electron Optics

Parameter

Description

SEM resolution

Gemini column in high resolution configuration (max. probe current
20 nA) at optimum working distance:

§

1.0 nm at 30 kV (STEM mode)

§

1.0 nm at 15 kV

§

1.6 nm at 1 kV

Acceleration volt-
age

Range:

 20 V to 30 kV

Adjustment:

 Continuously variable in 10 Volt steps

Probe current

20 nA high resolution configuration:

 3 pA to 20 nA

100 nA high current configuration:

 6 pA to 100 nA

Probe current selection

 via seven apertures (six apertures in case of

100 nA configuration) with electromagnetic selection and precise
alignment

Optional OptiProbe

 module for continuous probe current adjust-

ment

Magnification

Range:

 10x – 2,000,000x referenced to Polaroid 5" × 4.5" image for-

mat

Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006

147

Summary of Contents for SIGMA Series

Page 1: ...Instruction Manual ZEISS SIGMA series Field Emission Scanning Electron Microscope...

Page 2: ...copies for archiving purposes shall remain unaffected thereby Any viola tions may be prosecuted as copyright infringements The use of general descriptive names registered names trademarks etc in this...

Page 3: ...Hazards 16 2 3 9 Suffocation Hazards 17 2 4 Warning Labels and Lights 18 2 4 1 Warning Labels 18 2 5 Safety Devices and Interlocks 22 2 5 1 Protective Cover Panels 23 2 5 2 Main Disconnect Device 23 2...

Page 4: ...Modifying the Probe Current License OPTIPROBE 98 5 5 5 Changing the Extractor Voltage 98 5 6 Finding Appropriate Detector Settings 99 5 6 1 Selecting a Detector 99 5 6 2 Setting up the InLens SE Dete...

Page 5: ...7 2 1 Baking out the Gun Head 138 7 2 2 Calibrating OptiProbe 140 7 3 Power Circuit 140 7 3 1 Checking the Position of the Circuit Breakers 140 7 4 Detectors 141 7 4 1 Lubricating the Rod 141 7 5 PC...

Page 6: ...ntains information about starting the microscope and the software obtaining a first image adjusting important parameters and power ing down the microscope also in emergency Care and Mainte nance Infor...

Page 7: ...he Safety chapter are to be considered but also the safety instructions and warnings in other chapters Failure to comply with these instructions and warnings can result in both personal injury and pro...

Page 8: ...are For more detailed information on how to use SmartSEM please refer to its Online Help or ask your ZEISS Sales Service Partner System and 3rd Party Components Accessories The Microscope System can b...

Page 9: ...ZEISS 1 General Information 1 4 Contact Fax 49 7364 20 3226 Email service microscopy de zeiss com Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006 9...

Page 10: ...emental analysis with optional EDS spectroscopy at the focused electron beam position Crystal structure and orientation with optional EBSD detectors Info Not for therapeutic treatment or medical diagn...

Page 11: ...authorized by ZEISS to do so 2 2 1 Safe Operation Conditions If the product safety labels are covered or worn or if any of the safety devices are not in proper working condition operation of the micro...

Page 12: ...der spare parts Unless authorized by ZEISS all spare parts should be installed by a ZEISS service representa tive 2 3 Prevention of Hazards This section summarizes potential hazards and recommended sa...

Page 13: ...ervice the oil mist filter refer to pump manual and material safety data sheets Recommended is the connection to an exhaust line NOTICE Environmental risk due to disposal of aggressive or toxic chemic...

Page 14: ...bar If not properly handled the contained gas can abruptly escape and cause the gas cylinder to move in an uncontrollable manner 4 Observe all safety labels on the gas cylinders and all safety instru...

Page 15: ...s or the vibration block is moved body parts can be crushed 4 Take care when moving ancillary equipment CAUTION Moving the specimen stage Fingers can be trapped by the moving specimen stage 4 Always c...

Page 16: ...This is unavoidable because elec trons are accelerated by voltages up to 30 kV 4 Do not remove any parts around the column and chamber that are essential for radiation protection 4 Use genuine ZEISS p...

Page 17: ...the area around the microscope is sufficiently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of...

Page 18: ...t in clean and easily legible condition Damaged or illegible warning labels must be replaced immediately Always observe all warning labels on the complete Microscope System 2 4 1 Warning Labels Approp...

Page 19: ...ZEISS 2 Safety 2 4 Warning Labels and Lights Rear Side of Microscope 6 7 Rear Side of Plinth 8 9 10 11 13 12 CEE Connector 14 Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006 19...

Page 20: ...he cham ber door before you move the stage Reorder no 347800 0033 000 02en 4 At the front of the chamber door Risk of damage CAUTION 347800 0033 000 04en The FESEM or specimen could be damaged if spec...

Page 21: ...ed within the EVO SIGMA instrument The acceleration voltage is limited to 30 kV Dose rates around the microscope are less than the maximum permissible values CAUTION CAUTION X rays are produced within...

Page 22: ...n the grids of the electron optical column Only authorized service staff are allowed to ser vice the equipment Disconnect power and let surfaces cool before opening Reorder no 347800 003 200 Position...

Page 23: ...ive cover panels Operation of the microscope is only allowed with attached protective cover panels 2 5 2 Main Disconnect Device To disconnect the microscope with all its components from the mains supp...

Page 24: ...ker The circuit breaker does not completely isolate the plinth from the mains power This can only be done using the Main Disconnect Device 2 5 4 Emergency Off EMO Option External The Emergency Off Cir...

Page 25: ...n to keep it from being switched on e g during repair and maintenance work The Main Switch is located at the front of the EMO Circuit The Main Switch of the external EMO box guarantees an ampere inter...

Page 26: ...computer are not properly closed Any unsaved changes to files are lost The Emergency Off function ensures that all power to the microscope is safely cut off The Emergency Off is not appropriate for s...

Page 27: ...ck rod or the gate valve 2 5 7 Energy Isolating Devices At the site of installation the electrical power connection and the fluid connections must be equipped with energy isolating devices As energy i...

Page 28: ...n fully read and understood Also refer to manuals of accessories if applicable Especially the chapters Installation and Commissioning and First Operating Steps are important 3 1 System Overview Main C...

Page 29: ...Right hand tilt Sigma 300 Further options Additional chamberscope stubscope and external navigation camera Column maintenance kit O ring kit Airlock for quick specimen transfer without breaking the s...

Page 30: ...cuate the specimen chamber 7 The vacuum in the specimen chamber is measured by a Penning gauge 8 The detected vac uum values are displayed as System vacuum in the SmartSEM user interface As long as th...

Page 31: ...voltage is turned on in this mode 3 2 2 2 Variable Pressure Mode Purpose The variable pressure VP mode enables you to use the scanning electron microscope to image specimens that are non conducting s...

Page 32: ...ely compensated allowing easy imaging of the specimen 3 2 3 Electron Optical Column Gemini 1 Purpose The Gemini 1 column is the part of the microscope where electrons are emitted accelerated de flecte...

Page 33: ...tage UB liner voltage of 8 kV is applied to the beam booster in addition to the acceleration voltage so that a high beam energy is maintained throughout the entire col umn The function of the beam boo...

Page 34: ...orma tion refer to Principle of Signal Detection 34 3 2 4 Gun Modes The microscope can operate in different gun modes Imaging Analytic Imaging Gun Mode In Imaging gun mode the temperature of the Schot...

Page 35: ...nd specimen 1 Primary electrons 2 Auger electrons 3 Secondary electrons 4 Backscattered electrons 5 Characteristic X rays 6 Continuum X rays 7 Fluorescent X rays Primary Electrons Primary Electrons PE...

Page 36: ...Fig 15 Backscattered electron coefficient against atomic number BSE detectors are used to display the materials contrast because the backscatter coefficient is de pendent on the mean atomic number of...

Page 37: ...l contrast YAG BSD Detector 65 BSE Compositional contrast Electron backscatter diffrac tion EBSD detector BSE camera Metallurgy geology and electronics Kikuchi patterns crystallo graphic orientation a...

Page 38: ...d up to an acceleration voltage of 20 kV by an additional beam booster 3 voltage of 8 kV at the liner tube To ensure that the electrons reach the specimen surface 7 with the energy set as accel eratio...

Page 39: ...factors tat affects the signal to noise ratio and therefore the efficiency of the InLens SE detector For different imaging applications the working distance needs to be selected depending on the geome...

Page 40: ...s SE detector Fig 18 Effect on electrostatic field by the BSE detector 3 2 5 3 2 Benefits of the InLens SE Detector The main benefit of the InLens SE detector is its high detection efficiency particul...

Page 41: ...pecimen and enable good imaging of surface structures and contaminations At higher acceleration voltages the penetration depth of the primary electrons increases More in formation stems from the bulk...

Page 42: ...tration depth Charging Effects Another reason to use low acceleration voltages is to minimize and compensate the local charg ing on the surface of the specimen If electrons hit a non conducting or a p...

Page 43: ...V Fig 26 Comparison of topographic contrast of an integrated circuit InLens SE detector left Good imaging of sur face structures low topographic contrast SE detector right Good topographic imaging Acc...

Page 44: ...to 20 m Limitation of the probe current for the compensation of charges or for the analysis of beam sensitive specimens 60 m and 120 m Only recommended for analytical purposes Specimen tilt Avoid lar...

Page 45: ...surface properties and topography Fig 28 Comparison of SE detector images using positive and negative collector bias voltage SE detector using 300 V collector bias Good display of surface structures...

Page 46: ...objective lens itself This means they cannot be detected by the SE detector Depending on the specimen material and on the specimen geometry a minimum working dis tance of approximately 4 mm should be...

Page 47: ...ntrast is very poor left WD 9 mm using BSE detector Clear image showing good material contrast right In the previous figure the SE image taken at 5 mm working distance shows relatively poor mate rial...

Page 48: ...Acceleration voltage 0 02 kV to 30 kV In principle suitable for the entire high voltage range 1 kV to 5 kV Low voltage applications for the compensation of charges and for surface sensitive imaging 5...

Page 49: ...d to the MP Port 1 1 2 3 4 5 Fig 34 Schematics of the VPSE detector 1 Preamplifier 2 Photomultiplier 3 Objective lens 4 Light guide with collector electrode 5 Specimen Function The collector electrode...

Page 50: ...Use fast scan speeds and increase the number of frames N Collector Bias The collector bias corresponds to the voltage that is applied to the VPSE collector The collector bias accelerates the secondar...

Page 51: ...ard application for VPSE G4 detector Working distance 6 mm to 8 mm For low voltage applications 3 kV to 7 kV 8 mm to 15 mm For standard applications 7 kV to 25 kV Aperture 30 m The standard aperture i...

Page 52: ...ons as well as cations The additional electrons also accelerate towards the detector and collide with further gas molecules which are ionized The result is a charge cascade that amplifies the original...

Page 53: ...f a diode detector is selected 3 2 6 Specimen Stage Sigma 300 WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal...

Page 54: ...ng for precise fitting 1 Specimen holder 2 Specimen stage Function The stage can be operated using the dual joystick or using the SmartSEM software Axis Description Movement X X axis Movement towards...

Page 55: ...ecimen stage Fingers can be trapped by the moving specimen stage 4 Always close the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g twee...

Page 56: ...men is tilted at a certain work ing distance 3 3 Optional Components and Accessories 3 3 1 Optional Detectors 3 3 1 1 InLens Duo Detector Purpose The InLens Duo detector 1 allows imaging and mixing of...

Page 57: ...fferences in the speci men There are different types of detectors for backscattered electrons Most of these detectors use semiconductor diodes for signal detection The following semiconductor detector...

Page 58: ...Risk of malfunction The diode segments are sensitive to the light that is used for illumination in TV mode infrared and white When you use a diode detector always make sure that the TV illumination i...

Page 59: ...backscattered electrons hit the detector and most electrons pass through the hole without contributing to the signal The optimum solid angle for detection of the backscattered electrons exists only i...

Page 60: ...60 m Higher probe currents frequently improve the contrast 120 m Often only recommended for analytical applications Specimen tilt Avoid large angles of tilt if possible Operation mode Use of the BSE d...

Page 61: ...hese semiconductor detectors have a relatively small bandwidth and a high capacitance rela tively long discharge time and therefore a reduced scan rate is recommended when using them The SE detector c...

Page 62: ...ccessories ZEISS Fig 51 Compositional contrast image left and Shadow mode image right acquired using a BSD Fig 52 Compositional contrast image left and Shadow mode image right acquired using a BSD 62...

Page 63: ...ICE Motorized specimen stage Risk of damaging the detector when operating the motorized specimen stage 4 Retract the detector head completely after you have finished the work with the detector Info Ri...

Page 64: ...The emission of backscattered electrons from a specimen is related to the atomic number of the involved material Elements with high atomic numbers generate more backscattered electrons i e the backsca...

Page 65: ...type detector the YAG BSD detec tor does not have segments with changeable polarity and you can only use this detector for com position imaging In comparison to segment based BSD detectors the YAG BS...

Page 66: ...r quadrants for the dark field DF and one diode for the bright field BF imag ing The cone angles of the BF and DF signals depend on the specimen as well as the illumination aperture The center hole se...

Page 67: ...ens 4 Light guide with collector electrode 5 Specimen Function The prerequisite for using this detector is that the specimen emits light when interacting with the primary electron beam Differences in...

Page 68: ...Y axes and the stage rotation by turning Function All axes are deflection compensated When the joystick is moved only slightly the respective axis moves slowly Larger movements of the joystick result...

Page 69: ...the beam roundness by changing the stigmation deflectors 2 Aperture X Aperture Y Adjusts the mid column shift and tilt deflectors for aligning the beam along the column axis 3 Scan Rotate Rotates the...

Page 70: ...observed 8 Freeze Stops the scan and grabs one complete frame at the current imaging conditions 9 Exchange Resume Exchange Starts the pre defined macro for specimen exchange with the airlock Resume St...

Page 71: ...layout of the user interface 1 Title Bar Displays the name of the user interface and the logged on user 2 Menu Bar Enables you to access to SmartSEM features via sub menus 3 AVI Toolbar Contains the...

Page 72: ...ecipe management 3 4 2 Graphical Control Elements The following graphical control elements are used in the SmartSEM GUI Screenshot Control Element Function Tab Provides a group of graphical control el...

Page 73: ...ools Administrator User Access Level Description Novice Only the items assigned to the novice category are accessible These include most frequently used parameters Expert Items assigned to the novice...

Page 74: ...f the SmartSEM Program Suite is to access all necessary microscopy parame ters and software features to capture SEM data and optimize image acquisition Access Windows start menu SmartSEM Program Descr...

Page 75: ...libration Wizard Service activities for ZEISS service representatives only Gun Monitor Enables you to monitor important parameters of the microscope GUN Service Service activities for ZEISS service re...

Page 76: ...on requirements are to be observed and adhered to After installation or retrofitting thor oughly check that the Microscope System is in a safe operational state making sure in particular that all prot...

Page 77: ...These safety warnings have to be obeyed at any time by every person in the same room as the microscope WARNING Radiation hazard due to X rays X rays are generated inside the microscope during operati...

Page 78: ...rgizing the Microscope Before energizing the microscope make sure that the following safety warnings have been read and fully understood by each person who is in the same room as the microscope at any...

Page 79: ...in or as long as the Main Switch of the EMO Circuit is in the ON position To completely cut off the microscope from any mains power 4 with installed EMO Circuit set the Main Switch to the OFF positio...

Page 80: ...the EMO button to release it 5 Turn the Main switch counter clockwise to the Reset position and then back via OFF to the ON position 6 Press the green Start button 5 2 2 Starting the Microscope Info I...

Page 81: ...tton lights up green permanently 5 3 Starting the Software Procedure 1 Power up the computer and log in 2 Start the SmartSEM user interface via the ZEISS SmartSEM icon on the desktop Alternatively sel...

Page 82: ...n table entry F4 SHIFT Exit from Magnification Table mode F5 F5 SHIFT F6 F6 SHIFT F7 F7 SHIFT F8 F8 SHIFT User defined macros F9 Keys help displays this information F11 F11 SHIFT User defined macros F...

Page 83: ...CTRL T Calls Text Annotation CTRL V Displays the Vacuum status information Keypad Faster Scan Keypad Slower Scan ARROW Keys Refer to Use of ARROW Keys Image Buffer keys Refer to Image Buffer SHIFT an...

Page 84: ...esentatives before they perform any work on the microscope WARNING Aggressive or toxic chemicals Aggressive or toxic chemicals can cause chemical burns 4 When handling aggressive or toxic chemicals we...

Page 85: ...o insert the stub into the specimen holder use tweezers 3 To fix the stub to the specimen holder tighten the location screw with the hex key 4 Note down which fix position is occupied by the specimen...

Page 86: ...tage 4 Always close the chamber door before moving the specimen stage 4 To remove parts fallen into or near to the stage use a tool e g tweezers instead of your fingers Procedure 1 In the toolbar clic...

Page 87: ...with gaseous nitrogen 5 4 2 4 Mounting the Specimen Holder WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing...

Page 88: ...vacuum deterioration or prolonged pumping times 4 Always wear lint free gloves when touching the specimen specimen holder or stage Procedure 1 Carefully open the chamber door 2 If a specimen holder i...

Page 89: ...ist and Stage Topview from the lower drop down list INFO To open the Stage Navigation Bar navigate to View Toolbars and activate Stage Navigation Bar for Widescreen users Alternatively you can access...

Page 90: ...s within this chapter 2 In the SEM Controls panel select the Vacuum tab 3 Verify that the EHT Vac ready readout is EHT Vac ready Yes If not the correct vacuum is not achieved Check if the Pump procedu...

Page 91: ...an Image Info The following procedure describes the best way to quickly obtain an image without the con trol panel You can also use the control panel to adjust aperture alignment magnification fo cus...

Page 92: ...the mouse within the Image Area to adjust the magnification to 500 x 3 Hold down the mouse wheel and drag the mouse within the Image Area to adjust the working distance and focus the image 5 4 6 4 Se...

Page 93: ...nd brightness contrast The procedure consists of the following steps Adjusting the Magnification 93 Moving the Field of View at High Magnifications 93 Limiting the Scan Field 94 Aligning the Aperture...

Page 94: ...image in the reduced raster 5 4 7 4 Aligning the Aperture Info Alternatively to aligning the aperture manually use the Auto Wobble function via toolbar icon Procedure 1 In the SEM Controls panel sele...

Page 95: ...rrecting Astigmatism Procedure 1 Ensure that the Reduced Raster function is active 2 Select a detail e g a mark or an edge on the specimen surface Ensure that the selected detail is in the raster You...

Page 96: ...er 7 Enter the filename in the Filename input field 8 Click Save file name tif 9 To continue imaging click Unfreeze in the Scanning tab 5 5 Modifying Gun Parameters 5 5 1 Selecting the Gun Mode The mi...

Page 97: ...Faraday cup consists of a strongly absorbing material with a cavity covered by a small aperture If the beam is focused in this cavity no secondary elec trons and no backscattered electrons leave the F...

Page 98: ...alignment of the electron optical column OptiProbe has to be calibrated Prerequisite Requires the licenses OPTIPROBE and HIGH VOLTAGE Particular hardware and the specimen current amplifier are install...

Page 99: ...adout The Extractor V Target window is displayed 3 Enter a higher value 4 Click OK After you change the extractor voltage calibrate the probe current refer to Measuring the Probe Current 97 5 6 Findin...

Page 100: ...kV a WD of exactly 0 is not possible Info Avoid strong specimen tilting for the InLens SE detector Procedure 1 In the SEM Controls panel select the Detectors tab 2 From the Signal A drop down list se...

Page 101: ...s SE detector refer to Setting up the InLens SE Detector 100 Info Short working distances are preferable for good detection efficiency Avoid strong specimen tilting for the InLens Duo detector Procedu...

Page 102: ...contrast 5 kV 30 kV min 6 mm Procedure 1 In the SEM Controls panel select the Detectors tab 2 From the Signal A drop down list select SE2 3 Adjust the EHT working distance WD and collector voltage ac...

Page 103: ...VPSE bias according to the suggestions in the table in order to optimize the image 5 6 6 Setting up the C2D Detector Fig 68 C2D image of radiolaria Procedure 1 In the SEM Controls panel select the Det...

Page 104: ...angular resolved BSE images Use high or very high detector gain for low accelerating voltage and or low beam current The EHT should be bigger than 2 kV to achieve a significant detection efficiency Pr...

Page 105: ...it is recommended to use scan speed 6 or higher slower especially at small magnifications The lower the gain is the faster is the detector 5 6 8 Setting up the HDAsB Detector The HDAsB detector is opt...

Page 106: ...trol dialog displays the four quadrants outputs 5 Click a quadrant symbol to toggle its status between on white inverted black and off gray 6 To confirm the settings click Apply 7 To choose the respec...

Page 107: ...n 4 In the Detectors tab of the SEM Controls panel select the respective detector from the Signal A drop down list 5 Open the Panel Configuration Bar 6 Double click BSD Control to open the BSD Control...

Page 108: ...Procedure 1 Insert the detector If there is any resistance make sure the silver knob is untightened 2 In the SEM Controls panel select the Detectors tab 3 From the Signal A drop down list select YAG...

Page 109: ...ns SE detector the InLensDuo detector and the SE detector cannot be used Mode Booster Chamber Pressure High Vacuum HV On 10 Pa Variable Pressure VP Off 2 133 Pa Tab 4 VP configuration 5 7 1 Changing t...

Page 110: ...akes approximately 20 s 5 8 Working with Optional Accessories 5 8 1 Using the Optional Airlock 5 8 1 1 Unloading the Specimen Using an Airlock You can unload the specimen either manually or with pre d...

Page 111: ...he specimen chamber and is to be exchanged for another specimen Procedure 1 Switch off the EHT 2 To open the Stage Navigation Bar navigate to View Toolbars and activate Stage Navigation Bar for Widesc...

Page 112: ...k of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During specimen exchange keep the chamber door open as sho...

Page 113: ...s vented with nitrogen 5 Take hold of the airlock handle and open the airlock door 6 To exchange the whole specimen holder Turn the knob counter clockwise and detach the specimen holder from the airlo...

Page 114: ...o the Airlock WARNING Suffocation hazard due to lack of oxygen Gaseous dry nitrogen is used to vent the specimen chamber during specimen exchange Inhal ing nitrogen may cause unconsciousness 4 During...

Page 115: ...tion section of the Stage Navigation Bar 4 Close the airlock door 5 On the control panel press Transfer to change to Transfer mode Alternatively click Transfer in the Airlock panel The airlock is evac...

Page 116: ...automatically performs the following steps The gate valve is closed The column chamber valve is opened INFO The airlock macros can be modified according to your individual requirements Contact your lo...

Page 117: ...panel The gate valve is closed The airlock chamber is vented with nitrogen 2 Click Open Column Chamber Valve The column chamber valve is opened 3 Switch on the EHT Refer to Switching on the EHT 90 9 Y...

Page 118: ...r Log NOTICE Gases Unstable pressure or unwanted reactions between the plasma and gases injected into the chamber can damage the specimen or the vacuum system If a gas injection system or the charge c...

Page 119: ...ED is active This indicates that the plasma cleaning process is complete INFO If you wish to abort the cleaning cycle while it is still running click Stop cleaning The chamber is pumped 8 Wait until V...

Page 120: ...ed recipes 6 If a plasma cleaner with purge option is installed and if nitrogen purge cycles are necessary activate the Purge checkbox This adds additional values that can be edited 7 If required acti...

Page 121: ...nel Configuration Bar select Plasma Cleaning The Plasma Cleaning panel is displayed 2 To select a date for your cleaning schedule click the Calendar icon 3 In the input field on the left side of the C...

Page 122: ...ight is analyzed The stage position and working distance of the SEM and the Raman spectroscopic microscope are not identical Fig 73 SEM and Raman working distance Prerequisite SmartSEM is started Proc...

Page 123: ...tically The image of the USB TV camera is automati cally displayed to let you see the movement towards the Raman objective and the Raman working distance INFO The speed of the dual joystick de pends o...

Page 124: ...he electron microscope overlay the Raman image to the SEM image Import the SEM image via File Import Import SEM Image 12 In the Project Manager window drag the light microscope image and drop it on th...

Page 125: ...n Click and Move checkbox 15 Click on the light microscope image and accurately align it with the SEM image The Raman microscope is correlated with the electron microscope 16 To extract a bitmap image...

Page 126: ...Controls panel This can help to prevent oil vapors from penetrating into the specimen chamber during the period of storage NOTICE Schottky field emitter If the Schottky field emitter is switched on an...

Page 127: ...enu Bar select File Log Off A system message is displayed 2 Click Yes 3 Close the EM Server A system message is displayed 4 Click Yes INFO The EM server remains active 5 9 2 2 Exiting the SmartSEM Use...

Page 128: ...n Standby mode refer to Finishing the Work Session 126 or in OFF mode Procedure 1 If the microscope is not yet in OFF mode press the Off button at the front of the plinth When all subsystems are fully...

Page 129: ...5 s before touching the pins of the mains plug NOTICE Components in the high voltage circuitry When the microscope especially the gun is fully on an abrupt shutdown of all electrical sup plies may dam...

Page 130: ...ance Schedule To maintain best possible performance of the Microscope System it is essential to perform pre ventive maintenance on a regular basis The recommended intervals depend on the total uptime...

Page 131: ...For maintenance of the pre vacuum pump refer to the instruction manual of the pump provided by the pump manufacturer You can find this documentation in the document folder of your microscope 6 4 Care...

Page 132: ...Avoid contact with skin 4 Do not breathe vapor In case you have to clean the microscope always use a lint free cloth In case you need a cleaning liquid only isopropanol on a lint free cloth may be us...

Page 133: ...there is no change in total emission current Field emission gun has been damaged due to arcing Contact your local ZEISS ser vice representative to have the field emission gun replaced InLens image is...

Page 134: ...ballast at the pre vacuum pump Vac ready OK is dis played abnormally fast Penning gauge has not been identified correctly Restart the microscope If this does not solve the prob lem contact your local...

Page 135: ...Procedure 1 From the Windows start menu select SmartSEM SmartSEM Administrator The SmartSEM Administrator Log on window is displayed 2 Enter user name and password 3 To confirm click OK The SmartSEM A...

Page 136: ...mera If the CCD camera is installed at the back enter 180 If the CCD camera is installed at the front enter 0 If the CCD camera is installed at the side enter 90 180 0 90 chamber door 7 1 4 Resetting...

Page 137: ...e symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility fatigue leave the room immediately and inform t...

Page 138: ...un vacuum deteriorates with time It is possible to perform a bake out operation as a regular maintenance procedure to restore the vacuum The procedure consists of the following steps Switching off the...

Page 139: ...the Supervisor privilege and the user level Service Only advanced operators are allowed to perform the bakeout procedure Procedure 1 In the Panel Configuration Bar double click Bakeout The Bakeout di...

Page 140: ...e is performed which takes about fifteen minutes When the calibration procedure is finished a message is displayed 8 To finish the dialog click Yes Now OptiProbe is ready to be used 7 3 Power Circuit...

Page 141: ...After contact with the skin wash immediately with plenty of water and soap CAUTION Isopropanol Isopropanol is highly flammable and irritating to the eyes Vapors may cause drowsiness and dizziness 4 We...

Page 142: ...1 Backup the database to the server or to other storage 2 Delete the temporary files 3 Check for adequate free space on the hard drives 4 Backup the log file EMServer log 5 Erase the original log fil...

Page 143: ...rer WARNING Biological hazards Biological substances may pose a threat to the health of humans and other living organisms 4 Keep a logbook of the biological substances loaded into the microscope and s...

Page 144: ...ufficiently vented 4 If you begin to experience symptoms of asphyxia for example rapid breathing loss of mental alertness and or muscular coordination depression of sensations emotional insta bility f...

Page 145: ...sed for shipping or transport Fork lift and a hand pallet truck For on site transport and unloading a fork lift and a hand pallet truck are necessary Ensure all hallways and corners are wide enough to...

Page 146: ...ctive 2012 19 EU ZEISS has implemented a system for the return and recy cling of devices in member states of the European Union that ensures suitable reuse according to the EU Directives mentioned The...

Page 147: ...using the supplied mains cable The protective earth connection must not be im paired by the use of extension cables Info Your ZEISS Sales Service Partner will provide you with the detailed installati...

Page 148: ...compensation Automatic correction of apparent image rotation with changes in working distance Beam shift For precise adjustment of image position at high magnifications Maximum scan speed 50 ns pixel...

Page 149: ...s included in base tool configuration various specimen holders available as option Plasma cleaner optional Integrated plasma cleaner Chamber mounted plasma cleaner for removal of hydrocarbon contamina...

Page 150: ...hanneling contrast imaging of metals and min erals Four quadrant solid state BSD diode each segment 10 mm in tegrated in the Gemini objective lens for the detection of angular se lective backscattered...

Page 151: ...ur ZEISS Sales Service Partner will provide you with the detailed installation requirements Weight and Sizes Main Components Length mm Width mm Height mm Weight kg Plinth column 822 960 1757 636 Table...

Page 152: ...n working distance Beam shift For precise adjustment of image position at high magnifications Maximum scan speed 50 ns pixel Image framestore 4 3 format with 16 bit dynamic range 1024 768 pixels 2048...

Page 153: ...of hydrocarbon contamination from both specimen and chamber integrated software control for user defined cleaning cycles without user interaction after starting the cleaning process Vacuum Modes High...

Page 154: ...ctable multi mode solid state Backscattered Elec tron Detector BSD enables materials contrast crystal orientation and topographic imaging diode with 4 sectors and one additional segment Provides 4 par...

Page 155: ...arameter Requirement Installation site Exclusively inside buildings Recommended room size Min 3 6 m 5 0 m 2 3 m Service area Min 0 8 m at each side Entrance Min 0 8 m wide Hallways Min 1 0 m wide Corn...

Page 156: ...ower consump tion Max 3 kVA dependent on accessories Circuit breaker at house installation 16 A Type C Ampere interrupt ing capacity AIC 1500 A rms without external EMO box 10000 A rms with external E...

Page 157: ...min for ventilation of specimen chamber with chamber door open Pressure 0 2 3 3 bar Quality 4 6 with nitrogen content 99 996 Connection hose 4 mm inside diameter 10 m are delivered with the microscope...

Page 158: ...oximity Vibrations Horizontal vibrations in x y direction Up to 10 Hz less than 0 04 mm s 10 20 Hz less than 0 17 mm s 20 70 Hz less than 0 30 mm s Above 70 Hz less than 20 mm s Vertical vibrations in...

Page 159: ...per A Mains power supply 208 230 V max 16 A 2 Pre vacuum pump Equipotential bonding bar afety earth 3 Plinth and column Vacuum exhaust 4 Computer workplace Chilled water supply Dry compressed air Dry...

Page 160: ...9 Technical Data and Conformity 9 3 Installation Requirements ZEISS 9 3 2 System Layout 160 Instruction Manual ZEISS SIGMA series en US Rev 7 352102 9344 006...

Page 161: ...requirements Part 1 General requirements EN ISO 12100 2010 Safety of machinery General principles for design Risk assessment and risk reduction EN ISO 13849 1 2015 Safety of machinery Safety related p...

Page 162: ...resentative for information regarding how to order spare parts and consumables 4 Unless otherwise authorized by ZEISS all spare parts and consumables must be installed by a ZEISS service representativ...

Page 163: ...e beam booster so that a high beam energy is maintained throughout the entire column The beam booster technique has two main advan tages It minimizes beam widening that may occur due to stochastic ele...

Page 164: ...ve lens backwards and forward through the focus on the specimen plane When the aperture is misaligned a lateral shift is observed GIS Gas Injection System GUI Graphical User Interface H Height HD High...

Page 165: ...lectron Microscope SEMI Semiconductor Equipment and Materials International SEMI is a industry associa tion comprising companies involved in the electronics design and manufacturing supply chain Smart...

Page 166: ...logy enterprise operating in the fields of optics and optoelectronics Further in formation about ZEISS can be found at www zeiss com ZEISS Sales Service Partner The Sales Service Partner is generally...

Page 167: ...ables 130 Contamination 146 Control panel 69 Cover panel protective 23 D Decontamination 146 Detector 36 99 aBSD1 LH 63 104 aSTEM 141 BSD 57 60 107 BSD1 VP 141 BSD4 141 C2D 52 103 CL 67 108 Everhart T...

Page 168: ...n 79 81 N Nitrogen 134 O ON OFF switch 24 Online help 81 Operation 78 Operator Basic 11 Training 11 Optimizing the image 93 OptiProbe 98 140 P Penning gauge 134 Performance data 147 151 Plasma cleaner...

Page 169: ...tiching to standby 126 System vacuum 134 T Temperature 136 Tool 162 Touch alarm reset 136 Transfer position 111 112 Transmitted electron 36 Troubleshooting 133 Type plate 22 U User access level 73 Use...

Page 170: ...rl Zeiss Promenade 10 07745 Jena Germany phone 49 1803 33 63 34 fax 49 3641 64 3439 info microscopy de zeiss com www zeiss com microscopy Instruction Manual ZEISS SIGMA series en US Rev 7 Modification...

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