ZEISS
6 Care and Maintenance | 6.4 Care and Cleaning Work
Interval
Component/Part
Yearly or as required
(and after exchange of field emission gun)
§
Standard aperture
§
Anode aperture
§
Extractor aperture
§
Anode aluminum seal
§
Copper seal at gun head
Yearly or as required
Tip seal and tip O-ring of the pre-vacuum
pump
Yearly performance check
§
§
InLens SE detector
§
All optional detectors
* There is no warranty on field emission guns; manufacturers do not guarantee any lifetime.
Emitter lifetime depends on several operating parameters, mainly on the filament temperature.
An emitter can be destroyed by a catastrophic arc between the filament and the extractor
electrode.
Tab. 5: Schedule for the change of consumables
6.3.2 Servicing the Pre-vacuum Pump
For maintenance of the pre-vacuum pump, refer to the instruction manual of the pump provided
by the pump manufacturer.
You can find this documentation in the document folder of your microscope.
6.4 Care and Cleaning Work
All care and cleaning work not described here must only be performed by an authorized ZEISS ser-
vice representative.
NOTICE
Functional impairment due to dirt and moisture
Dirt, dust and moisture can impair the Microscope System’s functionality and can cause short-
circuits.
4
The ventilation slots must be unobstructed at all times.
4
Perform regular maintenance and cleaning according to the instructions in this document
and according to the instructions in the applicable documents.
4
Make sure that no cleaning liquid or moisture gets inside the Microscope System.
4
In case of damage, the affected parts of the Microscope System must be taken out of op-
eration.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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