Zeiss SIGMA Series, Instruction Manual

Page: 134 / 170

7 Troubleshooting | 7.1 Chamber ZEISS
Symptom Cause Measure
Stage does not move Stage needs to be initialized Refer to Initializing the Stage
[
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134]
If this does not solve the prob-
lem, contact your local ZEISS
service representative
Stored position of the
specimen stage cannot be
approached correctly Absolute stage movement is
required, stage needs to be
driven to a well-defined posi-
tion Refer to Initializing the Stage
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134]
Microscope does not vent No nitrogen Check nitrogen supply
No compressed air Check compressed air supply
Vac ready = OK is not
displayed after specimen
exchange
System vacuum is bad due to a
vacuum leak at the chamber
door Check the chamber door seal
for cleanliness
If required, refer to Replacing
the Chamber Door Seal
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137]
Vac ready = OK is dis-
played very late after
specimen exchange
Gas ballast is activated at the
pre-vacuum pump Deactivate gas ballast at the
pre-vacuum pump
Vac ready = OK is dis-
played abnormally fast
Penning gauge has not been
identified correctly Restart the microscope
If this does not solve the prob-
lem, contact your local ZEISS
service representative
Gun vacuum is worse
than 2 × 10⁻⁸ mbar The pumping capacity of the
ion getter pump decreases in
the course of time, thus deteri-
orating the gun vacuum Refer to Baking out the Gun
Head [
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138]
Tab. 6: Troubleshooting
7.1 Chamber
7.1.1 Initializing the Stage
If a stored stage position cannot be approached or if the stage does not move or does not move
accurately, the stage needs to be initialized.
CAUTION
Moving the specimen stage
Fingers can be trapped by the moving specimen stage.
4
Always close the chamber door before moving the specimen stage.
4
To remove parts fallen into or near to the stage use a tool (e.g. tweezers) instead of your
fingers.
Prerequisite
ü
The specimen chamber has been evacuated, refer to Loading the Specimen Chamber [
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85]
ü Requires the Stage Initialise privilege
134 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006