![background image](http://html2.mh-extra.com/html/zeiss/sigma-series/sigma-series_instruction-manual_4422473003.webp)
ZEISS
Table of Contents
Table of Contents
1 General Information........................................................................ 6
Explanation on Warnings and Additional Information .........................................
Safe Operation Conditions .................................................................... 11
Requirements for Personnel .................................................................. 11
Preventive Maintenance ........................................................................ 12
Safe Handling of Spare Parts ................................................................. 12
High Pressure Hazards........................................................................... 14
Magnetic Field Hazards ......................................................................... 14
Mechanical Hazards .............................................................................. 15
Safety Devices and Interlocks .............................................................................. 22
2.5.1
Protective Cover Panels ......................................................................... 23
Main Disconnect Device ........................................................................ 23
Emergency Off (EMO) Option External................................................... 24
Vacuum Locking Device ........................................................................ 26
Interlock System of Optional Airlock...................................................... 27
Energy Isolating Devices ........................................................................ 27
3 Product and Functional Description ................................................ 28
Vacuum System Pressure Modes ........................................................... 31
Electron Optical Column | Gemini 1 ....................................................... 32
Specimen Stage | Sigma 300 ................................................................. 53
Specimen Stage | Sigma 500 ................................................................. 55
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
3