Zeiss SIGMA Series, Instruction Manual

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ZEISS Table of Contents
Table of Contents
1 General Information........................................................................ 6
1.1 Text Conventions and Link Types ........................................................................ 6
1.2 Explanation on Warnings and Additional Information ......................................... 7
1.3 Further Applicable Documents ............................................................................ 8
1.4 Contact............................................................................................................... 8
2 Safety ............................................................................................. 10
2.1 Intended Use ...................................................................................................... 10
2.2 General Safety Information ................................................................................. 11
2.2.1
Safe Operation Conditions .................................................................... 11
2.2.2 Requirements for Personnel .................................................................. 11
2.2.3 Preventive Maintenance ........................................................................ 12
2.2.4 Safe Handling of Spare Parts ................................................................. 12
2.3 Prevention of Hazards ......................................................................................... 12
2.3.1
Biological Hazards ................................................................................. 12
2.3.2 Burn Hazards ........................................................................................ 12
2.3.3 Chemical Hazards.................................................................................. 13
2.3.4 Electrical Hazards .................................................................................. 13
2.3.5 High Pressure Hazards........................................................................... 14
2.3.6 Magnetic Field Hazards ......................................................................... 14
2.3.7 Mechanical Hazards .............................................................................. 15
2.3.8 Radiation Hazards ................................................................................. 16
2.3.9 Suffocation Hazards .............................................................................. 17
2.4 Warning Labels and Lights .................................................................................. 18
2.4.1
Warning Labels ..................................................................................... 18
2.5 Safety Devices and Interlocks .............................................................................. 22
2.5.1
Protective Cover Panels ......................................................................... 23
2.5.2 Main Disconnect Device ........................................................................ 23
2.5.3 Circuit Breaker ...................................................................................... 24
2.5.4 Emergency Off (EMO) Option External................................................... 24
2.5.5 Vacuum Locking Device ........................................................................ 26
2.5.6 Interlock System of Optional Airlock...................................................... 27
2.5.7 Energy Isolating Devices ........................................................................ 27
3 Product and Functional Description ................................................ 28
3.1 System Overview................................................................................................. 28
3.2 Main Components .............................................................................................. 30
3.2.1
Vacuum System .................................................................................... 30
3.2.2 Vacuum System Pressure Modes ........................................................... 31
3.2.3 Electron Optical Column | Gemini 1 ....................................................... 32
3.2.4 Gun Modes ........................................................................................... 34
3.2.5 Detectors .............................................................................................. 34
3.2.6 Specimen Stage | Sigma 300 ................................................................. 53
3.2.7 Specimen Stage | Sigma 500 ................................................................. 55
3.3 Optional Components and Accessories................................................................ 56
3.3.1
Optional Detectors ................................................................................ 56
3.3.2 Dual Joystick ......................................................................................... 68
3.3.3 Control Panel ........................................................................................ 69
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006 3