Zeiss SIGMA Series, Instruction Manual

Page: 56 / 170

3 Product and Functional Description | 3.3 Optional Components and Accessories ZEISS
Axis Description Movement
X X-axis Movement towards or away from the cham-
ber door (horizontal movement in the image)
Y Y-axis Movement
Z Height Vertical movement (movement towards or
away from the focal plane of the image)
R Rotation Stage rotation parallel to the X-Y plane
T Tilt Stage tilt about an axis parallel to the X axis
The stage is eucentric, which means that the tilt axis intersects the beam axis. The specimen sur-
face is located in the eucentric point, where the tilt axis meets the beam axis. This guarantees that
the focus and the point of interest are maintained when the specimen is tilted at a certain work-
ing distance.
3.3 Optional Components and Accessories
3.3.1 Optional Detectors
3.3.1.1 InLens Duo Detector
Purpose
The InLens Duo detector
1
allows imaging and mixing of high contrast topography (SE) as well
as clear compositional contrast (BSE).
The InLens Duo Detector is only available for Sigma 500.
Position
The annular shaped in-column detector is located above the objective lens and replaces the InLens
SE detector.
1
2
3
4
5
Fig. 42: Schematics of the InLens Duo detector
1 InLens Duo detector 2 Filtering grid
3 Beam path 4 Objective lens
5 Specimen
Function The SEs and BSEs generated at the impact point of the primary electron beam are intercepted by
the low electrical field of the Gemini column. These electrons are accelerated by the field of the
electrostatic lens.
56 Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006