5 Commissioning and First Operating Steps | 5.8 Working with Optional Accessories
ZEISS
5.8.2 Using the Optional Plasma Cleaner
5.8.2.1 Activating the Plasma Cleaner
The Plasma Cleaner is an optional accessory that allows you to decontaminate the specimen
chamber and any loaded specimens. The plasma is fully contained in the Plasma Cleaner unit. The
radicals migrate into the specimen chamber and chemically react with unwanted hydrocarbons.
After a plasma cleaning cycle, the specimen surface provides optimal imaging conditions even at
very low imaging voltages.
Info
Depending on the plasma cleaner model, T pump mode and purging are available and the
Plasma Cleaning
panel looks different.
Info
You can view a log file that contains all relevant events concerning the Plasma Cleaner via
Panel Configuration Bar > Plasma Cleaning > View Log
. The log file can be used for trou-
bleshooting and to determine when the next plasma cleaning process should be scheduled.
Fig. 72: Plasma Cleaner.Log
NOTICE
Gases
Unstable pressure or unwanted reactions between the plasma and gases injected into the
chamber can damage the specimen or the vacuum system.
If a gas injection system or the charge compensation function are active, the gas injection af-
fects the pressure range and can create unwanted reactions between the plasma and the in-
jected gas.
4
Make sure the chamber pressure is stable during plasma cleaning.
4
Do not use the GIS or the charge compensator when using the plasma cleaner.
NOTICE
Plasma cleaning
Plasma can damage sensitive specimens.
4
Always test the plasma cleaner on specimens of the same material before cleaning any im-
portant specimen.
Procedure
1. If your microscope is equipped with the airlock, make sure that the gate valve of the airlock
is closed. Do not use the airlock while using the Plasma Cleaner.
For more information refer to the instruction manual of the airlock.
NOTICE
The pressure range applied during plasma cleaning can damage the
electron source. To protect the electron source from the harmful pressure range,
close the column chamber valve.
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Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006