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Front Panel Operation
2-38
General measurement procedure
The following steps summarize the basic steps to measure re-
sistivity:
NOTE
To ensure proper operation, always enable
zero check ("ZeroCheck" displayed) be-
fore changing functions (V, I, R, or Q).
The Z-CHK key controls zero check.
WARNING
Make sure the V-Source is in standby. In
standby, the OPERATE indicator is off.
The OPER key toggles the V-Source be-
tween standby and operate.
1. Enable zero check by pressing Z-CHK.
2. Select and configure the desired resistivity measurement
type from the MEAS-TYPE (RESISTIVITY) option of
the ohms configuration menu as explained in paragraph
2.7.3.
3. Select the V-Source adjustment mode. With AUTO V-
Source selected, the instrument will automatically select
the optimum V-Source value (40V or 400V) for the mea-
surement range. With MANUAL V-Source selected, you
select the V-Source range and value. The V-Source ad-
justment mode is selected from the V-SOURCE item of
the CONFIGURE OHMS menu. See paragraphs 2.7
(Auto V-Source) and 2.7.3 (V-SOURCE) for details.
4. Connect the sample to be measured to the Model
6517A. Figure 2-36 shows the connections to the Model
8009 for surface and volume resistivity measurements.
5. Select the ohms function by pressing R.
6. If the manual V-Source adjustment mode is selected, use
the
,
, and the VOLTAGE SOURCE
▲
and
▼
keys to set the voltage level. The V-Source range can be
changed from the RANGE item of the CONFIGURE V-
SOURCE menu. See paragraph 2.9.2 for details on set-
ting range and level for the V-Source. Note that you will
not be able to adjust the V-Source if AUTO V-Source is
selected.
7. Use the
▲
and
▼
RANGE keys to select the ohms mea-
surement range, or select AUTO range. Note that with
AUTO range selected, the instrument will not go the
2T
Ω
, 20T
Ω
and 200T
Ω
ranges.
8. Disable zero check by again pressing Z-CHK.
9. Press OPER to place the V-Source in operate and after
an appropriate electrification period (bias time), note the
resistivity reading. Typically, an electrification period of
60 seconds is used. See paragraph 2.7.5 (Electrification
Time) for details.
NOTE
A flashing VOLTAGE SOURCE OPER-
ATE LED indicates that the V-Source has
gone into current limit. The programmed
voltage is not being applied to the load. In
this situation, try using a lower voltage for
the measurement.
10. Place the V-Source in standby by again pressing OPER
and enable zero check.
WARNING
Place the V-Source in standby before
making or breaking connections to the
test fixture or DUT.