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OHMS (Normal Method)
TEMPERATURE
ACCURACY1
COEFFICIENT
5
1
⁄
2
-DIGIT
(10–100% Range)
(10–100% Range)
RESO-
18°–28°C (1 Yr.)
0°–18°C & 28°–50°C
AUTO
AMPS
RANGE
LUTION
±(% rdg+counts)
±(% rdg+counts)
V SOURCE
RANGE
2 M
Ω
10
Ω
0.125 + 1
0.01 + 1
40 V
200 µA
20 M
Ω
100
Ω
0.125 + 1
0.01 + 1
40 V
20 µA
200 M
Ω
1 k
Ω
0.15 + 1
0.015 + 1
40 V
2 µA
2 G
Ω
10 k
Ω
0.225 + 1
0.035 + 1
40 V
200 nA
20 G
Ω
100 k
Ω
0.225 + 1
0.035 + 1
40 V
20 nA
200 G
Ω
1 M
Ω
0.35 + 1
0.110 + 1
40 V
2 nA
2 T
Ω
10 M
Ω
0.35 + 1
0.110 + 1
400 V
2 nA
20 T
Ω
100 M
Ω
1.025 + 1
0.105 + 1
400 V
200 pA
200 T
Ω
1 G
Ω
1.15 + 1
0.125 + 1
400 V
20 pA
1Specifications are for auto V-source ohms, when properly zeroed, 5
1
⁄
2
-digit, 1 PLC, median filter on, digital filter = 10 readings. If user selectable voltage is required,
use manual mode. Manual mode displays resistance (up to 1018
Ω
) calculated from measured current. Accuracy is equal to accuracy of V-source plus accuracy of
selected Amps range.
PREAMP SETTLING TIME:
Add voltage source settling time to preamp settling time in Amps specification..
OHMS (Alternating Polarity Method)
The alternating polarity sequence compensates for the background (offset) currents of the material or device under test. Maximum tolerable offset up to full scale of the
current range used.
Using Keithley 8002A or 8009 fixture
REPEATABILITY:
∆
IBG
×
R/VALT + 0.1% (1
σ
) (instrument temperature constant ±1°C).
ACCURACY: (
V IMEASErr
×
R)/VALT
where:
∆
IBG is a measured, typical background current noise from the sample and fixture.
VALT is the alternating polarity voltage used.
VSRCErr is the accuracy (in volts) of the voltage source using VALT as the setting.
IMEASErr is the accuracy (in amps) of the ammeter using VALT /R as the rdg.
VOLTAGE SOURCE
ACCURACY
TEMPERATURE
(1 Year)
COEFFICIENT
5
1
⁄
2
-DIGIT
18°–28°C
0°–18°C & 28°–50°C
RANGE
RESOLUTION
±(% s offset)
±(% offset)/°C
100 V
5 mV
0.15 + 10 mV
0.005 + 1 mV
1000 V
50 mV
0.15 +100 mV
0.005 +10 mV
MAXIMUM OUTPUT CURRENT:
±10mA; active current limit at <11.5mA for 100V range.
±1mA; active current limit at <1.15mA for 1000V range.
SETTLING TIME
: <8ms to rated accuracy for 100V range.
<50ms to rated accuracy for 1000V range.
NOISE:
<150µV p-p from 0.1Hz to 10Hz for 100V range.
<1.5mV p-p from 0.1Hz to 10Hz for 1000V range.
TEMPERATURE (THERMOCOUPLE)
ACCURACY (1 Year)1
THERMOCOUPLE
18°–28°C
TYPE
RANGE
±(% rdg + °C)
K
–25°C to 150°C
± (0.3% + 1.5°C)
1 Excluding probe errors, T
CAL ± 5°C, 1 PLC integration time.
HUMIDITY
ACCURACY (1 Year)1
RANGE
18°–28°C, ±(% rdg + % RH)
0–100%
± (0.3% +0.5)
1 Humidity probe accuracy must be added. This is ±3% RH, for Model
6517RH, up to 65°C probe environment, not to exceed 85°C.
Specifications A-3