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7 Maintenance and Repair | 7.3 Change of Consumables and Chemicals
ZEISS
7.3 Change of Consumables and Chemicals
The change of consumables and chemicals has to be performed by a ZEISS service representative
at mandatory intervals.
The times scheduled are designed for the maximum equipment performance level (i.e. 24 h per
day of permanent operation).
Interval
Component/Part
Every 6000 h
1
(filament on)
Field emission gun (filament)
1
Yearly or as required
(and after exchange of field emission gun)
§
Multihole/singlehole aperture
§
Anode aperture
§
Extractor aperture
§
Anode aluminum seal
§
Copper seal at gun head
Yearly or as required
Tip seal of the pre-vacuum pump
Yearly performance check
§
SE detector
§
InLens SE detector
§
EsB detector
As required, approx. 3000 µAh
§
Ion source
§
If used up
Precursors
1
There is no warranty on field emission guns; manufacturers do not guarantee any lifetime.
Tab. 3: Schedule for the change of consumables
94
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000