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ZEISS
Table of Contents
Checking the CAN Communication .......................................................... 98
Defining the Post Initialization Position of the Stage................................. 99
Changing the Joystick TV Angle ............................................................... 99
Replacing the Chamber Door Seal ............................................................ 100
Checking the Water Flow and Temperature ............................................. 101
Baking out the Gun Head......................................................................... 101
Calibrating the Probe Current................................................................... 102
Checking the Position of the Circuit Breakers ........................................... 103
Checking the Lifetime of the Ion Source................................................... 104
Regenerating the Ion Source by Heating .................................................. 105
Manually Finding a New Extractor Value .................................................. 105
Disposing of Solid Waste (Consumables) .................................................. 109
Disposing of the Microscope .................................................................... 109
Installation Requirements ..................................................................................... 114
10.2.1 Layout and Connections........................................................................... 117
10.2.2 System Layout.......................................................................................... 118
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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