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6 Operation | 6.2 Obtaining a First Image
ZEISS
6.2.2 Loading the Specimen Chamber
Info
If your microscope is equipped with the optional airlock, use the airlock for loading the speci-
men chamber. For more information refer to the respective instruction manual.
Overview
The procedure contains the following steps:
§
Displaying the Crossbeam SEM Control Panel [
§
Driving the Stage to a Low Position [
§
Venting the Specimen Chamber [
§
Mounting the Specimen Holder [
§
Evacuating the Specimen Chamber [
6.2.2.1 Displaying the Crossbeam SEM Control Panel
Prerequisite
ü
The SmartSEM user interface is started.
1. From the
Menu Bar
, select
Tools > Goto panel
.
à
The
Panel Configuration Bar
is displayed. It contains an alphabetical list of functions.
2. Double-right-click Crossbeam SEM Control.
à
The Crossbeam SEM Control panel is added to the docking panel.
6.2.2.2 Driving the Stage to a Low Position
Prerequisite
ü
The stage is initialized.
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. In the
Detector / Active Channel
section, select
TV
from the
Signal A
drop-down list.
à
The inside of the specimen chamber is visible in the
Image Area
.
3. In the Crossbeam SEM Control panel, select the
Stage
tab.
4. Activate the
Track Z
checkbox.
à
The current working distance (WD) is displayed in the
Data Zone
.
5. If the
Data Zone
is deactivated, activate it via
Menu Bar > View > Data Zone > Show
Data Zone
.
6. Use the dual joystick to drive the specimen stage downwards to a low position.
NOTICE
Risk of property damage: Observe the stage movement via camera to
avoid crashing.
6.2.2.3 Venting the Specimen Chamber
1. In the Crossbeam SEM Control panel, select the
Vacuum
tab.
2. Click
Vent
.
à
The
Vent
message box is displayed.
3. To start venting, click
Yes
.
INFO
: If the
Stage is not initialized
system message is displayed, refer to
à
The specimen chamber is purged with gaseous nitrogen.
66
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000