![background image](http://html.mh-extra.com/html/zeiss/crossbeam-350/crossbeam-350_instruction-manual_927679105.webp)
ZEISS
8 Troubleshooting | 8.7 Focused Ion Beam
8.7.2 Regenerating the Ion Source by Heating
From time to time, the gallium emitter has to be regenerated by heating.
The heating procedure is used in following cases:
§
If the suppressor voltage has reached its limits (i.e. 0 V or 2 kV) while a probe current of 2 μA
cannot be maintained anymore
§
If the ion source does not start emitting
§
If the source is switched into
Standby
mode because the emission current exceeds the
threshold defined in the SmartSEM Administrator in the
Go to Standby if emission exceeds
input field.
Info
Source heating can also be performed via Source Management. Source Management includes
automatically triggered procedures to ensure an optimum performance of the ion source.
These procedures are configured in the
SmartSEM Administrator
via
FIB > FIB Source
Management
.
NOTICE
Risk of property damage: Ion source
Danger of damaging the ion source due to overheating. Excessive filament heating may reduce
source life.
4
Only heat as often as necessary.
Prerequisite
ü
Requires the
Supervisor
privilege.
1. In the
Panel Configuration Bar
, double-click
FIB Ga Source Heating
.
à
The
FIB Ga Source Heating
window is displayed.
2. Click
Multi-Heat
.
à
An automatic heating routine is performed.
3. If the ion source still does not start emitting, find a new extractor value.
Manually Finding a New Extractor Value [
.
8.7.3 Manually Finding a New Extractor Value
If emission still fails after performing the multi-heating routine (see
), you have to find a new extractor value.
In a first step, you can use the automatic FIB extractor adjustment functions:
§
You can use Source Management. Source Management includes automatically triggered pro-
cedures to ensure an optimum performance of the ion source. These procedures are config-
ured in the
SmartSEM Administrator
via
FIB > FIB Source Management
.
§
You can trigger the extractor adjustment via
FIB Control Panel > FIB > Extr. Adjust
.
If the automatic FIB extractor adjustment functions fail, you have to find a new extractor value
manually.
1. In the
FIB Toolbar
, from the
FIB
drop-down list, select
FIB
.
à
The
FIB
tab of the
FIB Control Panel
is displayed.
2. Click
Standby
.
à
The FIB gun is set to
Standby
mode.
3. To disable the suppressor regulation, deactivate the
Regulate
checkbox.
4. Set the
FIB Suppressor Target
to 1200 V.
5. Select the
Options
tab.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
105