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6 Operation | 6.2 Obtaining a First Image
ZEISS
6.2.5 Switching on the EHT
When you switch on the EHT, the gun starts emitting electrons.
Prerequisite
ü
The chamber and the gun head have been evacuated.
ü
The gun has been switched on.
1. In the Crossbeam SEM Control panel, select the Control tab.
2. Double-click the
EHT Target
readout.
à
The
EHT Target
window is displayed.
3. In the input field, enter
10
and click
OK
.
4. In the right part of the
Status Bar
, click
.
à
The pop-up menu for vacuum, gun, and EHT activation is displayed.
5. Click
EHT On
.
à
à
In the right part of the
Status Bar
, the vacuum, gun, and EHT status buttons merge to
.
6.2.6 Acquiring an Image
Info
The following procedure describes the best way to quickly obtain an image without the con-
trol panel. You can also use the control panel to adjust aperture alignment, magnification/fo-
cus and brightness/contrast.
Overview
The procedure contains the following steps:
§
Selecting the Column Mode and Probe Current [
§
§
§
§
Setting a Long Working Distance [
§
Adjusting Brightness and Contrast [
§
Visualizing Details on the Specimen Surface [
6.2.6.1 Selecting the Column Mode and Probe Current
1. In the Crossbeam SEM Control panel, select the
Control
tab.
2. In the
Column
section, click
Normal
.
à
The column mode is set to
Normal
.
3. In the
Beam
section, double-click the
I Probe
readout.
à
The
I Probe
window is displayed.
4. In the input field, enter
300
.
à
The probe current is set to 300 pA.
6.2.6.2 Selecting the SE Detector
1. In the Crossbeam SEM Control panel, select the Imaging tab.
2. In the Detector / Active Channel section, select
Signal A = SE2
from the
Signal A
drop-
down list.
INFO:
We recommend using the SE detector to obtain the first image. This detector pro-
vides a good signal-to-noise ratio even at long working distances.
70
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000