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6 Operation | 6.2 Obtaining a First Image
ZEISS
1. Carefully open the chamber door.
2. If a specimen holder is mounted onto the specimen stage, remove it by sliding it out of the
dovetail rails.
3. Mount the prepared specimen holder by sliding it into the dovetail rails.
Make sure that the dovetail is placed in the correct orientation so that the flat side of the
dovetail of the specimen holder is flush with the milled edge of the specimen stage.
4. Carefully close the chamber door.
à
The specimen holder and the specimen inside the chamber are visible in the
Image
Area
.
6.2.2.5 Evacuating the Specimen Chamber
1. In the Crossbeam SEM Control panel, select the
Vacuum
tab.
2. Click
Pump
.
à
Several vacuum status messages display the current vacuum levels.
à
As soon as the appropriate vacuum level is achieved, the vacuum status message
Vac
Status = Ready
is displayed.
This may take up to 5 minutes.
6.2.3 Locating the Specimen
Overview
The procedure contains the following steps:
§
Positioning the Stub under the Electron Beam [
§
Moving the Specimen to the Proper Height [
6.2.3.1 Positioning the Stub under the Electron Beam
NOTICE
Risk of property damage: Driving the stage
While the stage is driven manually, there is a risk of damaging the objective lens and/or the
specimen.
4
Ensure not to hit the objective lens while driving the stage.
4
Monitor the moving stage in TV mode.
4
To stop the moving stage immediately, press
F12
or press the
Break
push button of the
dual joystick panel.
4
Manually lower the stage before you open the chamber door. Alternatively, activate the
Z
move on Vent
checkbox in the
Stage
tab of the Crossbeam SEM Control panel.
1. In the
Stage Navigation Bar
, select
Stage Sideview
from the upper drop-down list and
Stage Topview
from the lower drop-down list.
INFO:
To open the
Stage Navigation Bar
, navigate to
View > Toolbars
and activate
Stage Navigation Bar (for Widescreen users)
. Alternatively, you can access the
Stage
Navigation Bar
via
Stage > Navigation
.
2. Click
Settings
.
à
The
Stage Navigation Settings
dialog is displayed.
3. In the
Stage Navigation Settings
dialog, click
Show Holder Gallery
.
à
The
Sample Holder Gallery
dialog is displayed.
4. In the
Sample Holder Gallery
dialog, click the specimen holder you are using.
5. Activate the
Is Available
checkbox.
6. Close the
Sample Holder Gallery
dialog.
68
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000