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ZEISS
8 Troubleshooting | 8.4 Column
8.3.6 Checking the Water Flow and Temperature
1. In the
Panel Configuration Bar
, double-click
Water Flow/Temperature
.
à
The
Water Flow/Temperature
panel is displayed.
2. Check the entries.
à
If a value is critical, it is displayed in red.
8.4 Column
8.4.1 Baking out the Gun Head
The pumping capacity of the ion getter pump decreases in the course of time, thus deteriorating
the gun vacuum. This can be remedied by an ion getter pump bakeout as a regular maintenance
procedure.
Overview
The procedure contains the following steps:
§
§
§
8.4.1.1 Switching off the Gun
NOTICE
Risk of property damage: Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
4
When using the Standby mode, activate the Partial Vent on Standby function.
1. In the right part of the
Status Bar
, click
or
.
à
The pop-up menu for Vacuum, Gun and EHT activation is displayed.
2. Click
Shutdown Gun
.
3. Wait until the gun has ramped down.
à
This may take up to 5 minutes.
8.4.1.2 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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