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ZEISS
6 Operation | 6.2 Obtaining a First Image
7. Close the
Stage Navigation Settings
dialog.
8. In the Stage Topview section of the
Stage Navigation Bar
, spot the stub with the speci-
men you want to observe.
9. To drive the stub directly under the electron beam, double-click the stub.
6.2.3.2 Moving the Specimen to the Proper Height
1. In the
Stage Navigation Bar
, drag the
Zoom View
slider to the right end, so that the
schematics are zoomed in.
2. In the Crossbeam SEM Control panel, select the Imaging tab.
3. In the Detector / Active Channel section, select
USB TV1
from the
Signal A
drop-down list.
à
The inside of the specimen chamber is visible in the
Image Area
.
4. Use the dual joystick to carefully move up the stage so that the stub you are using is in the
center of the upper schematic.
NOTICE
Risk of property damage: Observe the camera image in order not to
crash into the pole piece.
6.2.4 Switching on the Gun
NOTICE
Risk of property damage: Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
4
When using the Standby mode, activate the Partial Vent on Standby function.
Prerequisite
ü
The chamber and the gun head have been evacuated.
1. In the right part of the
Status Bar
, verify whether the gun is switched on or off.
à
If
or
is displayed, the gun is already switched on and you can skip the fol-
lowing steps.
à
If
is displayed, the gun is switched off. Follow the operating steps within this
chapter.
2. In the Crossbeam SEM Control panel, select the
Vacuum
tab.
3. Verify that the
EHT Vac ready
readout is
EHT Vac ready = Yes
.
If not, the correct vacuum is not achieved. Check if the
Pump
procedure has been com-
pleted.
4. In the right part of the
Status Bar
, click
.
à
The pop-up menu for vacuum, gun, and EHT activation is displayed.
5. Click
Gun On
.
à
The gun runs up.
à
This may take up to 5 minutes.
Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000
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