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6 Operation | 6.7 Shutting down the System
ZEISS
à
When high vacuum is reached in the total system, the column chamber valve is automati-
cally reopened.
à
A
Chamber Status = at HV
message is displayed in the
Vacuum
tab.
à
The beam booster and the acceleration voltage are activated.
6.7 Shutting down the System
6.7.1 Finishing the Work Session
NOTICE
Risk of property damage: Schottky field emitter
If the Schottky field emitter is switched on and off too frequently or inappropriately, its lifetime
is reduced.
4
Avoid switching off the gun during the working week.
4
Use Standby mode for the weekend or a break of up to a week.
4
When using the Standby mode, activate the Partial Vent on Standby function.
Prerequisite
ü
The microscope is in ON mode.
1. In the Crossbeam SEM Control panel, select the Gun tab.
2. Activate the EHT Off @ Log Off checkbox.
3. Activate the Leave Gun On at Shutdown checkbox.
4. Only when interrupting work for longer periods between 2 and 7 days: In the Vacuum tab
activate the Partial Vent on Standby checkbox.
à
This maintains the gun vacuum, and switches off and protects the turbo pump.
5. Exit the SmartSEM user interface. Refer to
Exiting the SmartSEM User Interface [
6. Close all programs and software.
7. Select Windows start button > Power icon > Shut down.
8. At the front of the plinth, press the
Standby
button.
à
The microscope switches to Standby mode.
6.7.1.1 Exiting the SmartSEM User Interface
1. From the Menu Bar, select File > Exit.
à
A system message is displayed.
2. Click Yes.
3. Close the EM Server.
à
A system message is displayed.
4. Click Yes.
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Instruction Manual ZEISS Crossbeam 350 | en-US | Rev. 3 | 349500-8111-000